Thermochromic window doped with dopant and method of manufacturing the same
View Patent ↗A thermochromic window doped with a dopant and a method of manufacturing the same. The thermochromic window includes a substrate and a thermochromic thin film formed on the substrate. The thermochromic thin film has a thermochromic material doped with a dopant, the concentration of the dopant gradually decreasing in a depth direction from one surface of the upper surface and the undersurface of the thermochromic thin film. The thermochromic window has a high level of visible light transmittance and high phase change efficiency while having a low phase transition temperature.
1. A thermochromic window comprising:
a substrate; and
a thermochromic thin film formed on the substrate,
wherein the thermochromic thin film comprises a thermochromic material doped with a dopant, a concentration of the dopant gradually decreasing in a depth direction from one surface of an upper surface and an undersurface of the thermochromic thin film.
2. The thermochromic window of claim 1 , further comprising a barrier film disposed between the substrate and the thermochromic thin film.
3. The thermochromic window of claim 2 , wherein the barrier film has a composition that includes one material selected from the group consisting of silicon dioxide (SiO 2 ), aluminum oxide (Al 2 O 3 ), niobium pentoxide (Nb 2 O 5 ), titanium dioxide (TiO 2 ) and silicon nitride (Si 3 N 4 ).
4. The thermochromic window of claim 2 , wherein the barrier film further includes a dopant.
5. The thermochromic window of claim 1 , wherein the dopant is one selected from the group consisting of Mo, W, Cr, Ni and Zr.
6. The thermochromic window of claim 4 , wherein the dopant is one selected from the group consisting of Mo, W, Cr, Ni and Zr.
7. The thermochromic window of claim 1 , wherein the thermochromic material comprises one material selected from the group consisting of vanadium dioxide (VO 2 ), titanium (III) oxide (Ti 2 O 3 ), niobium oxide (NbO 2 ) and nickel sulfide (NiS).
8. A method of manufacturing a thermochromic window, comprising:
forming a dopant layer on a substrate; and
forming a thermochromic thin film by depositing a thermochromic material on the dopant layer so that a dopant that constitutes the dopant layer diffuses into the thermochromic material.
9. The method of claim 8 , further comprising post-annealing a resultant structure after forming the thermochromic thin film.
10. The method of claim 8 , further comprising forming a barrier film on the substrate before forming the dopant layer, wherein the dopant layer is formed on the barrier film.
11. The method of claim 8 , wherein a thickness of the dopant layer is 5 nm or less.
12. The method of claim 8 , wherein the thermochromic material comprises vanadium dioxide (VO 2 ), and a thickness of the thermochromic thin film is at least 50 nm.
13. The method of claim 8 , wherein forming the thermochromic thin film comprises sputtering.