Semiconductor device and method for manufacturing semiconductor device
View Patent ↗A semiconductor device according to one embodiment includes a semiconductor substrate, a back-gate layer formed above the semiconductor substrate, and a stacked body formed above the back-gate layer and comprising a plurality of insulating layers alternately formed between a plurality of electrode layers. The lowermost electrode layer of the plurality of electrode layers contains metal, and remaining electrode layers of the plurality of electrode layers other than the lowermost electrode layer do not contain the metal. Furthermore, the semiconductor device includes a pair of columnar semiconductor layers penetrating the stacked body and a semiconductor layer connecting lower portions of the pair of columnar semiconductor layers, the semiconductor layer embedded in the surface of the back-gate layer.
1. A semiconductor device, comprising:
a semiconductor substrate;
a back-gate layer formed above the semiconductor substrate;
a stacked body formed above the back-gate layer, the stacked body including a plurality of insulating layers alternately formed between a plurality of electrode layers, wherein a lowermost electrode layer of the plurality of electrode layers contains a metal and remaining electrode layers of the plurality of electrode layers other than the lowermost electrode layer do not contain the metal of the lowermost electrode layer;
a pair of columnar semiconductor layers penetrating the stacked body; and
a semiconductor layer connecting lower portions of the pair of columnar semiconductor layers, the semiconductor layer embedded in a surface of the back-gate layer.
2. The semiconductor device according to claim 1 , wherein
the plurality of insulating layers comprise a material having an etch rate that is greater than an etch rate of the lowermost electrode layer.
3. The semiconductor device according to claim 2 , wherein
the remaining electrode layers comprise a material having an etch rate that is greater than the etch rate of the lowermost electrode layer.
4. The semiconductor device according to claim 3 , wherein
the plurality of insulating layers comprise silicon oxide,
the lowermost electrode layer comprises tungsten or tungsten silicide, and
the remaining electrode layers comprise silicon.
5. The semiconductor device according to claim 1 , wherein
each of the remaining electrode layers comprises a thickness that is greater than a thickness of the lowermost electrode layer.
6. The semiconductor device according to claim 5 , wherein
the remaining electrode layers have almost a same thickness.
7. A semiconductor device, comprising:
a semiconductor substrate;
a back-gate layer formed above the semiconductor substrate;
a stacked body formed above the back-gate layer and comprising a plurality of insulating layers alternately formed between a plurality of electrode layers, the stacked body having a lowermost electrode layer of the plurality of electrode layers that contains a metal and remaining electrode layers of the plurality of electrode layers other than the lowermost electrode layer;
a pair of columnar semiconductor layers penetrating the stacked body; and
a semiconductor layer connecting lower portions of the pair of columnar semiconductor layers, the semiconductor layer embedded in a surface of the back-gate layer, wherein
the material of the plurality of insulating layers contains silicon oxide,
the material of the lowermost electrode layer contains tungsten or tungsten silicide, and
the material of the remaining electrode layers contains silicon.
8. The semiconductor device according to claim 7 , wherein
the plurality of insulating layers comprise a material having an etch rate that is greater than an etch rate of the lowermost electrode layer.
9. The semiconductor device according to claim 8 , wherein
the remaining electrode layers comprise a material having an etch rate that is greater than the etch rate of the lowermost electrode layer.
10. The semiconductor device according to claim 7 , wherein
each of the remaining electrode layers comprises a thickness that is greater than a thickness of the lowermost electrode layer.
11. The semiconductor device according to claim 10 , wherein
the remaining electrode layers have almost a same thickness.
12. A semiconductor device, comprising:
a semiconductor substrate;
a back-gate layer formed on the semiconductor substrate;
a stacked body comprising a plurality of insulating layers alternately formed between a plurality of electrode layers formed on the back-gate layer, wherein a lowermost electrode layer of the plurality of electrode layers comprises a metal and remaining electrode layers of the plurality of electrode layers other than the lowermost electrode layer do not contain the metal of the lowermost electrode layer;
a pair of columnar semiconductor layers penetrating the stacked body; and
a semiconductor layer connecting lower portions of the pair of columnar semiconductor layers, the semiconductor layer embedded in a surface of the back-gate layer.
13. The semiconductor device according to claim 12 , wherein
the plurality of insulating layers comprise a material having an etch rate that is greater than an etch rate of the lowermost electrode layer.
14. The semiconductor device according to claim 13 , wherein
the remaining electrode layers comprise a material having an etch rate that is greater than the etch rate of the lowermost electrode layer.
15. The semiconductor device according to claim 12 , wherein
the plurality of insulating layers comprise silicon oxide,
the lowermost electrode layer comprises tungsten or tungsten silicide, and
the remaining electrode layers comprise silicon.
16. The semiconductor device according to claim 12 , wherein
each of the remaining electrode layers comprises a thickness that is greater than a thickness of the lowermost electrode layer.
17. The semiconductor device according to claim 16 , wherein
the thickness of the remaining electrode layers are substantially the same.
18. The semiconductor device according to claim 12 , further comprising:
an insulator penetrating the stacked body.
19. The semiconductor device according to claim 18 , wherein
the insulator separates the lowermost electrode layer.