IP Library Granted Patent US 9,310,200
Granted Patent B2
US 9,310,200 · App. 13/927,299 · Granted Apr 12, 2016

Sensor device regulation and related systems and methods

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Quick Facts
Patent No.
US 9,310,200
App. No.
13/927,299
Granted
Apr 12, 2016
Kind
B2
Abstract

A sensor device includes a sensor element; and a wiring substrate having a first joint surface electrically joined with the sensor element, a substrate body that contains an organic insulating material and in which an electronic component is embedded, and a regulation part that regulates the first joint surface from deforming.

Claims (47)

1. A sensor device comprising:

a sensor element; and

a wiring substrate comprising:

a first joint surface electrically joined with the sensor element,

a substrate body that contains an organic insulating material and in which an electronic component is embedded, and

a regulation part that regulates deformation of the first joint surface caused by thermal expansion or contraction of the sensor element.

2. The sensor device according to claim 1 , wherein

the first joint surface is disposed on the substrate body; and

the regulation part includes a core part embedded in the substrate body.

3. The sensor device according to claim 2 , wherein

the core part is annularly disposed around the electronic component.

4. The sensor device according to claim 3 , wherein

the wiring substrate further includes a second joint surface that faces the first joint surface; and

the substrate body further includes

a first wiring layer disposed on a side of the first joint surface, and

a second wiring layer that is disposed on a side of the second joint surface and faces the first wiring layer with the core part and the electronic component interposed therebetween.

5. The sensor device according to claim 2 , further comprising a shield part that is disposed on the first joint surface and covers the sensor element.

6. The sensor device according to claim 5 , wherein

the regulation part further includes a first joint part that joins the shield part and the core part.

7. The sensor device according to claim 6 , wherein

an absolute value of a difference of linear expansion coefficients of the shield part and the sensor element is smaller than an absolute value of a difference of linear expansion coefficients of the organic insulating material and the sensor element.

8. The sensor device according to claim 2 , wherein

an absolute value of a difference of linear expansion coefficients of the core part and the sensor element is smaller than an absolute value of a difference of linear expansion coefficients of the organic insulating material and the sensor element.

9. The sensor device according to claim 1 , wherein

the regulation part includes a base material of an inorganic insulating material disposed between the sensor element and the substrate body; and

the first joint surface is disposed on the base material.

10. The sensor device according claim 9 , wherein

the regulation part further includes a core part embedded in the substrate body.

11. The sensor device according to claim 10 , wherein

the regulation part further includes a second joint part that joins the base material and the core part.

12. The sensor device according to claim 9 , wherein

the base material is mounted on the substrate body; and

the wiring substrate further includes an adhesive layer that is filled in between the base material and the substrate body.

13. The sensor device according to claim 9 , wherein

the base material is disposed opposite to the first joint surface and further includes a third joint surface that is electrically joined with the electronic component.

14. The sensor device according to claim 9 , further comprising a shield part that is disposed on the wiring substrate and covers the sensor element.

15. The sensor device according to claim 14 , wherein

the shield part is disposed on the first joint surface.

16. The sensor device according to claim 15 , wherein

the substrate body includes a fourth joint surface that faces the base material; and

the shield part is disposed on the fourth joint surface and covers the base material and the sensor element.

17. The sensor device according to claim 9 , wherein

the substrate body has a longitudinal elastic modulus smaller than that of the base material.

18. The sensor device according to claim 1 , wherein

the sensor element faces the electronic component with the first joint surface interposed therebetween.

19. The sensor device according to claim 1 , wherein

the sensor element is a gyrosensor.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 19, 2016
From: SONY CORPORATION
To: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
Reel/Frame 040419/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 26, 2013
From: KABASAWA, HIDETOSHI; WATANABE, SHIGETO
To: SONY CORPORATION
Reel/Frame 030690/0624 →