Methods for manufacturing hybrid coils for magnetic write heads used in storage systems
View Patent ↗Methods for manufacturing hybrid coils for magnetic write heads used in disk drives are described. One such embodiment includes a magnetic read/write head including a read transducer, and a write transducer including a pair of write poles, a hybrid coil including a first coil having a pancake coil configuration with at least one turn positioned between the pair of write poles, and a second coil having a helical coil configuration including a plurality of turns positioned between the pair of write poles, the second coil coupled to the first coil, where the at least one turn of the first coil is interleaved with the turns of the second coil.
1. A method for manufacturing a magnetic read/write head of a storage system, the method comprising:
forming a substrate comprising a read transducer;
forming a first coil having a pancake coil configuration on a first layer, the first layer on the substrate;
forming a first portion of a second coil on the first layer, the second coil having a helical coil configuration; and
forming a second portion of the second coil on a second layer, the second layer on the first layer,
wherein the first coil and the second coil are coupled to form a hybrid coil, and
wherein the first coil and the second coil are interleaved on the first layer.
2. The method of claim 1 , wherein the forming the first portion of the second coil on the first layer further comprises forming an intervening layer comprising a top yoke of a write transducer on the first layer, and forming the second layer on the intervening layer.
3. The method of claim 1 , wherein the forming the first coil having the pancake coil configuration on the first layer further comprises forming a first insulation layer to insulate the first coil from the second coil on the first layer.
4. The method of claim 3 , wherein the first insulation layer is comprised of a material selected from the group consisting of alumina and resist.
5. The method of claim 4 :
wherein a thickness of the alumina ranges from 0.1 to 0.2 microns, and
wherein a thickness of the resist ranges from 0.4 to 0.5 microns.
6. The method of claim 1 , wherein the forming the first portion of the second coil on the first layer further comprises planarizing the first portion using a chemical mechanical planarization process.
7. The method of claim 1 , further comprising forming a plurality of coil vias configured to couple the first portion to the second portion.
8. The method of claim 1 , wherein the forming the second portion of the second coil on the second layer, the second layer on the first layer comprises:
forming a second insulation layer on the second layer to insulate turns of the second portion of the second coil; and
planarizing at least one turn of the second portion using a chemical mechanical planarization process.
9. The method of claim 1 , wherein the first coil comprises at least one turn and the second coil comprises a plurality of turns.
10. The method of claim 9 , wherein the first coil comprises a plurality of turns and the second coil comprises at least three turns.
11. The method of claim 10 , wherein the turns of the first coil are interleaved with the turns of the second coil.
12. The method of claim 9 , wherein the first coil consists of two turns and the second coil consists of three turns.
13. The method of claim 9 , wherein the first coil comprises an interleaved section and a non-interleaved section, wherein a width of the at least one turn of the first coil in the interleaved section is less than a width of the at least one turn of the first coil in the non-interleaved section.
14. The method of claim 9 , wherein the second coil comprises an interleaved section and a non-interleaved section, wherein a width of turns of the second coil in the interleaved section is less than a width of turns of the second coil in the non-interleaved section.
15. The method of claim 1 , further comprising forming a jumper and a plurality of coil vias couple the first coil and the second coil.
16. The method of claim 1 , wherein the hybrid coil comprises a first terminal on the second layer and a second terminal on the second layer.
17. The method of claim 1 , wherein the hybrid coil comprises a first terminal on the first layer and a second terminal on the second layer.
18. The method of claim 1 , wherein at least one turn of the second coil is wrapped around a top yoke of a write transducer.