Non-volatile semiconductor storage device
A non-volatile semiconductor storage device disclosed in the embodiment has a semiconductor substrate, a first insulating film, a first charge storage film, a second insulating film, a second charge storage film, a third insulating film, and a control electrode. In this non-volatile semiconductor storage device, the first and second charge storage films comprise a metallic material, a semi-metallic material or a semiconductor material. One of the first, second, and third insulating films is a multi-layered insulating film formed by layering multiple insulating films. This non-volatile semiconductor storage device further has a film comprising of any one of an oxide film, nitride film, boride film, sulfide film, and carbide film that is in contact with one interface of the laminated insulating film and contains one type of atom selected from aluminum, boron, alkaline earth metal, and transition metal at a concentration in the range of 1E12 atoms/cm 2 to 1E16 atoms/cm 2 .
1. An integrated circuit memory, comprising:
a semiconductor layer;
a first charge storage layer overlying the semiconductor layer;
a first dielectric overlying the first charge storage layer;
a first metal layer overlying the first dielectric;
a second dielectric overlying the first metal layer;
a second charge storage layer overlying the second dielectric; and
a gate electrode overlying the second charge storage layer, wherein the first and second dielectric comprise an oxide, a nitride, or combinations of an oxide and a nitride.
2. The integrated circuit memory of claim 1 , further including a tunnel insulating layer contacting the first charge storage layer.
3. The integrated circuit memory of claim 2 , wherein the tunnel insulating layer includes a third dielectric layer overlying the semiconductor layer;
a second metal layer overlying the third dielectric layer; and
a fourth dielectric overlying the second metal layer.
4. The integrated circuit memory of claim 1 , wherein the metal layer includes any one type of atomic species selected from aluminum, a transition metal, alkaline earth metals, boron and sulpher.
5. The integrated circuit memory of claim 1 , wherein the first metal layer comprises aluminum oxide.
6. The integrated circuit of claim 5 , wherein the aluminum layer comprises at least 1E12 atoms/cm 2 .
7. The integrated circuit of claim 5 , wherein the aluminum layer comprises less than 1E16 atoms/cm 2 .
8. The integrated circuit memory of claim 1 , further including an interpoly dielectric film overlaying the second charge storage layer and provided below the gate electrode, the interpoly dielectric film having at least two dielectric layers with a metal layer interposed therebetween.