Oscillation piece, oscillator, electronic device, electronic apparatus, and mobile object
An oscillation piece includes a first oscillation arm and a second oscillation arm, a first base that connects ends of the first oscillation arm and the second oscillation arm on one side to each other and a second base that connects ends of the first oscillation arm and the second oscillation arm on the other side to each other, and weight films provided on each of the first oscillation arm and the second oscillation arm. The drive electrodes are disposed in positions where the amount of distortion produced in the first oscillation arm and the second oscillation arm is maximized, and the weight films are disposed in positions where the amount of distortion produced in the first oscillation arm and the second oscillation arm is minimized. The oscillation frequency of the oscillation piece can be precisely adjusted by removing part of the weight films.
1. An oscillation piece comprising:
a first oscillation arm and a second oscillation arm each of which is provided with a plurality of drive electrodes;
a first base that connects ends of the first oscillation arm and the second oscillation arm on one side to each other and a second base that connects ends of the first oscillation arm and the second oscillation arm on the other side to each other; and
a plurality of weight films provided on each of the first oscillation arm and the second oscillation arm, wherein
the plurality of drive electrodes are provided on end areas of the first and second oscillation arms directly adjacent to the first and second bases and center areas of the first and second oscillation arms between the first and second bases, and
the plurality of weight films are provided on intermediate areas of the first and second oscillation arms between the plurality of drive electrodes.
2. The oscillation piece according to claim 1 ,
wherein each of the plurality of weight films is a metal film, and
the plurality of drive electrodes and the plurality of weight films are located in positions independent of each other.
3. The oscillation piece according to claim 1 ,
wherein the plurality of weight films are made of the same material as the plurality of drive electrodes.
4. An oscillator comprising:
the oscillation piece according to claim 1 ; and
a package that accommodates the oscillation piece.
5. An electronic device comprising:
the oscillation piece according to claim 1 ; and
a package that accommodates the oscillation piece.
6. The electronic device according to claim 5 ,
wherein the package includes a package base to which the first base of the oscillation piece is fixed so that the second base is located in an inner space of the package and shifted from the package base in a plan view,
a flexible lid that seals an opening of the package base, and
a transmission portion that transmits a displacement of the lid to the second base of the oscillation piece.
7. An electronic apparatus comprising the oscillation piece according to claim 1 .
8. A mobile object comprising the oscillation piece according to claim 1 .