Method for cleaning imprinting mask
View Patent ↗According to one embodiment, provided is a method for cleaning an imprinting mask including a template having an uneven pattern, a base layer disposed on the template, and a sacrificial film disposed on the base layer. In the method for cleaning the imprinting mask, the sacrificial film is removed, and a contaminant adhered on the sacrificial film is removed from the template pattern.
1. A method for cleaning an imprinting mask including a template having an uneven pattern and a base layer, the method comprising:
removing a sacrificial film layer formed by using a silane coupling agent reaction on a base layer that is formed along a concave portion and a convex portion of the uneven pattern; and
removing a contaminant adhered on the sacrificial film layer, wherein the sacrificial film layer is silicon oxide.
2. The method of claim 1 , wherein the base layer comprises silicon nitride.
3. The method of claim 1 , further including the step of removing the contaminant by exposing the contaminant to a cleaning solution.
4. The method of claim 1 , further including the step of forming another sacrificial film layer on the base layer.
5. The method of claim 4 , wherein the step of removing the another sacrificial film layer comprises exposing the sacrificial film layer to a cleaner including NH4OH, H2O2, and H2O.