Simultaneous wafer bonding and interconnect joining
View Patent ↗Disclosed are a microelectronic assembly of two elements and a method of forming same. A microelectronic element includes a major surface, and a dielectric layer and at least one bond pad exposed at the major surface. The microelectronic element may contain a plurality of active circuit elements. A first metal layer is deposited overlying the at least one bond pad and the dielectric layer. A second element having a second metal layer deposited thereon is provided, and the first metal layer is joined with the second metal layer. The assembly may be severed along dicing lanes into individual units each including a chip.
1. A method of forming a microelectronic assembly comprising the steps of:
providing a microelectronic element having a major surface, and a dielectric layer and at least one bond pad exposed at the major surface, the microelectronic element containing a plurality of active circuit elements, wherein a height of the at least one bond pad above the major surface differs from a height of the dielectric layer above the major surface, the dielectric layer of at least one of the elements being compressible to absorb any dimensional tolerances;
providing a second element having a coefficient of thermal expansion of less than 10 ppm/° C., the second element having a major surface and a dielectric layer exposed at the major surface of the second element;
forming a first metal layer such that a first portion of the first metal layer overlies the at least one bond pad and a second portion of the first metal layer overlies the dielectric layer of the microelectronic element;
forming a second metal layer overlying the dielectric layer of the second element; and
joining the first metal layer with the second metal layer.
2. The method of claim 1 , wherein the step of joining includes juxtaposing the at least one bond pad of the microelectronic element with at least one bond pad exposed at the major surface of the second element, thereby simultaneously bonding the microelectronic and second elements and electrically interconnecting the juxtaposed bond pads.
3. The method of claim 1 , wherein the steps of forming each include depositing a first stage including at least one of copper or aluminum onto at least one of the microelectronic element or the second element.
4. The method of claim 1 , wherein the step of forming the first metal layer includes forming a metal over substantially the entire major surface of the microelectronic element, and further comprising the step of removing a portion of the metal such that the metal extends to a predetermined height above the major surface of the microelectronic element.
5. The method of claim 4 , further comprising removing the metal directly overlying the major surface of the microelectronic element at a gap between the at least one bond pad thereof and the dielectric layer thereof.
6. The method of claim 5 , wherein the gap is large enough to provide a relief volume sufficient to compensate for a sum of the total variation in co-planarity of top surfaces of the first metal layer overlying the at least one bond pad and the dielectric layer on the microelectronic element, and the total variation in co-planarity of top surfaces of the second metal layer overlying the dielectric layer on the second element and at least one bond pad exposed at the major surface thereof.
7. The method of claim 1 , wherein the step of joining includes heating at least one of the first and second metal layers to a temperature between about 50 and 300° C.
8. The method of claim 1 , wherein at least one of the first and second metal layers includes at least a portion which is exothermic and thermally-activated through application of heat, and the step of joining includes heating the at least a portion of the exothermic metal layer to thermally activate such layer.
9. The method of claim 1 , wherein the second element includes at least one bond pad exposed at the major surface thereof, and wherein at least one of the elements includes a through silicon via electrically connected with the at least one bond pads of such element and extending from the major surface of such element toward a second surface of such element remote from the major surface of such element.
10. The method of claim 9 , wherein a through silicon via extends through the microelectronic and second elements and is electrically connected with a bond pad of the microelectronic element and a bond pad of the second element.
11. The method of claim 1 , wherein at least one of the steps of forming includes depositing a reflow metal, and the step of joining includes heating the reflow metal to a temperature that causes the reflow metal to melt.
12. The method of claim 1 , wherein the steps of forming include depositing copper, and the step of joining includes applying heat and pressure between the elements such that the copper overlying the microelectronic element and the copper overlying the second element fuse together.
13. The method of claim 12 , further comprising forming a layer of gold on the copper overlying at least one of the elements, and the step of joining includes heating the gold to a temperature at which the gold diffuses into the copper.
14. The method of claim 1 , wherein the step of forming the first and second metal layers includes depositing a base metal and a layer of gold overlying the base metal, wherein the step of joining includes applying heat and pressure to the elements until the first and second metal layers fuse together.
15. A microelectronic assembly comprising:
a microelectronic element having a major surface, and a compliant layer and at least one bond pad exposed at the major surface, the microelectronic element containing a plurality of active circuit elements;
a second element having a coefficient of thermal expansion of less than 10 ppm/° C., the second element having a major surface and a compliant layer exposed at the major surface thereof;
a first metal layer overlying the at least one bond pad and the compliant layer of the microelectronic element, wherein a gap is formed in the first metal layer between the at least one bond pad and the compliant layer;
a second metal layer overlying the compliant layer of the second element; and
wherein first portions of the first and second metal layers overlying the compliant layers are joined together so as to mechanically and electrically connect the microelectronic element with the second element.
16. The assembly of claim 15 , wherein the second element has at least one bond pad exposed at the major surface thereof, the second metal layer overlies the at least one bond pad, wherein second portions of the first and second metal layers overlying the at least one bond pads and being separate from the first portions are joined together.
17. The assembly of claim 15 , wherein the gap is large enough to provide a relief volume sufficient to compensate for a sum of the total variation in co-planarity of the top surfaces of the first metal layer overlying the at least one bond pad and the compliant layer on the microelectronic element.
18. The assembly of claim 15 , wherein the height of the at least one bond pad above the major surface of the microelectronic element differs from the height of the compliant layer above the major surface of the microelectronic element.
19. A microelectronic assembly comprising:
a microelectronic element having a major surface and a compliant layer exposed at the major surface; and
a second element having a major surface and a compliant layer exposed at the major surface of the second element;
the major surfaces of the microelectronic and second elements confronting one another with a plurality of metal elements disposed between the compliant layers, the metal elements being electrically isolated from the microelectronic element,
wherein the metal elements join the microelectronic and second elements with one another,
wherein on each of the microelectronic element and the second element, a gap is formed along the major surface between one or more of the metal elements and an adjacent portion of the compliant layer,
wherein the gap is large enough to provide a relief volume into which a reflowable metal can flow from between the compliant layers of the microelectronic and second elements, the relief volume being sufficient to compensate for a sum of the total variation in co-planarity of top surfaces of the metal elements and the compliant layer overlying the major surface of the microelectronic element, and the total variation in co-planarity of top surfaces of the metal elements and the compliant layer overlying the major surface of the second element.
20. The assembly of claim 19 , wherein the microelectronic element is a chip, and the second element has an area substantially the same as an area of the chip.