Semiconductor device with epitaxial semiconductor layer for source/drain on substrate, and method of manufacturing the same
To improve performance of a semiconductor device. Over a semiconductor substrate, a gate electrode is formed via a first insulating film for a gate insulating film, and a second insulating film extends from over a side wall of the gate electrode to over the semiconductor substrate. Over the semiconductor substrate in a part exposed from the second insulating film, a semiconductor layer, which is an epitaxial layer for source/drain, is formed. The second insulating film has a part extending over the side wall of the gate electrode and a part extending over the semiconductor substrate, and a part of the semiconductor layer lies over the second insulating film in the part extending over the semiconductor substrate.
1. A semiconductor device having a MISFET, the MISFET comprising:
a semiconductor substrate;
a gate electrode formed over the semiconductor substrate via a gate insulating film;
a first side wall insulating film extending from over a side wall of the gate electrode to over the semiconductor substrate;
a first epitaxial semiconductor layer formed on the semiconductor substrate exposed from the first side wall insulating film; and
a second side wall insulating film formed over the side wall of the gate electrode via the first side wall insulating film, wherein
the first side wall insulating film has a part extending over the side wall of the gate electrode and a part extending over the semiconductor substrate,
a part of the first epitaxial semiconductor layer lies over the first side wall insulating film in the part extending over the semiconductor substrate, and
a thickness of the first side wall insulating film and the second side wall insulating film in a gate length direction is shorter than a length of the part of the first side wall insulating film in the gate length direction.
2. The semiconductor device according to claim 1 , wherein the first epitaxial semiconductor layer is a semiconductor layer for source/drain.
3. The semiconductor device according to claim 2 , wherein, in an upper part of the first epitaxial semiconductor layer, a compound layer of a metal and an element configuring the first epitaxial semiconductor layer is formed.
4. The semiconductor device according to claim 3 , wherein a part of the second side wall insulating film lies over the first epitaxial semiconductor layer.