IP Library Granted Patent US 9,363,853
Granted Patent B2
US 9,363,853 · App. 13/954,480 · Granted Jun 7, 2016

System and method for powering dual magnetrons using a dual power supply

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Quick Facts
Patent No.
US 9,363,853
App. No.
13/954,480
Granted
Jun 7, 2016
Kind
B2
Abstract

A system and method for powering a dual magnetron with a dual power supply is disclosed. A first power supply supplies a first voltage to a first magnetron. A second power supply supplies a second voltage to a second magnetron. A balancer circuit controls a drive current for altering a magnetic field of the first magnetron and a magnetic field of the second magnetron to maintain the first voltage and the second voltage at a substantially equal voltage.

Claims (21)

1. A system comprising:

a first power supply to supply a first voltage;

a second power supply to supply a second voltage;

a first magnetron to be powered by the first power supply;

a second magnetron to be powered by the second power supply;

a balancer circuit to control a drive current for altering a magnetic field of the first magnetron and a magnetic field of the second magnetron to maintain the first voltage and the second voltage at a substantially equal voltage;

a first coil driver electrically coupled to the balancer circuit and magnetically coupled to the first magnetron; and

a second coil driver electrically coupled to the first coil driver and magnetically coupled to the second magnetron,

wherein the first coil driver and the second coil driver receive the drive current, and

wherein the first coil driver and the second coil driver are electrically coupled in series.

2. The system of claim 1 , wherein the first voltage and the second voltage each comprise a substantially constant voltage.

3. The system of claim 1 , wherein the first power supply is further to provide a first supply current to the first magnetron and the second power supply is further to provide a second supply current substantially equal to the first supply current to the second magnetron to maintain a substantially common operating point between the first magnetron and the second magnetron.

4. The system of claim 1 , wherein the drive current energizes the first coil driver and the drive current energizes the second coil driver to adjust the magnetic field of the first magnetron and the magnetic field of the second magnetron in opposite directions, respectively, to maintain the first voltage and the second voltage at the substantially equal voltage.

5. The system of claim 1 , wherein the balancer circuit further comprises an auxiliary power supply for supplying the drive current.

6. The system of claim 5 , further comprising a processing device in signal communication with the first power supply for sensing the first voltage and in signal communication with the second power supply for sensing the second voltage.

7. The system of claim 6 , wherein the processing device comprises a digital signal processor.

8. The system of claim 6 , wherein the processing device supplies an error signal to the auxiliary power supply to adjust the drive current.

9. The system of claim 8 , wherein the error signal supplied to the auxiliary power supply is based on an output of a proportional-integral-derivative (PID) feedback loop or a proportional-integral (PI) servo-loop implemented by the processing device.

10. The system of claim 6 , wherein the processing device senses a difference in magnitude of voltage between the first voltage and the second voltage.

11. The system of claim 10 , wherein the drive current comprises a polarity corresponding to a polarity of the difference in magnitude between the first voltage and the second voltage.

12. The system of claim 6 , wherein a magnitude of the drive current is based on an instantaneous voltage difference between the first voltage and the second voltage and a rate of convergence between the first voltage and the second voltage.

Assignments (4)
MERGER Recorded Aug 13, 2025
From: EXCELITAS TECHNOLOGIES CORP.; EXCELITAS NOBLELIGHT AMERICA LLC
To: EXCELITAS TECHNOLOGIES CORP.
Reel/Frame 072013/0592 →
CHANGE OF NAME Recorded Apr 9, 2024
From: HERAEUS NOBLELIGHT AMERICA LLC
To: EXCELITAS NOBLELIGHT AMERICA LLC
Reel/Frame 067041/0312 →
CHANGE OF NAME Recorded Feb 18, 2015
From: HERAEUS NOBLELIGHT FUSION UV INC.
To: HERAEUS NOBLELIGHT AMERICA LLC
Reel/Frame 035021/0864 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 19, 2014
From: GHARAGOZLOO, MAHMOOD; YEH, TA HAI; SWAIN, PRADYUMNA KUMAR
To: HERAEUS NOBLELIGHT FUSION UV INC.
Reel/Frame 033137/0617 →