Radiation detector
View Patent ↗According to one embodiment, a radiation detector includes a substrate, a scintillator layer, a moisture-proof body and an adhesive layer. The substrate is partitioned into at least an active area and a bonding area. The substrate includes a photoelectric conversion element located in the active area and configured to convert fluorescence to an electrical signal, an organic resin protective layer located at an outermost layer in the active area, and an inorganic protective film located at an outermost layer of the bonding area. The scintillator layer is formed on the organic resin protective layer so as to cover the photoelectric conversion element and configured to convert radiation to the fluorescence. The moisture-proof body is formed so as to cover the scintillator layer. The adhesive layer is formed on the inorganic protective film and bonds the moisture-proof body to the substrate.
1. A radiation detector comprising:
a substrate partitioned into at least an active area and a bonding area, the substrate including a photoelectric conversion element located in the active area and configured to convert fluorescence to an electrical signal, an organic resin protective layer located at an outermost layer in the active area, and an inorganic protective film located at an outermost layer of the bonding area;
a scintillator layer formed on the organic resin protective layer so as to cover the photoelectric conversion element and configured to convert radiation to the fluorescence;
a moisture-proof body formed so as to cover the scintillator layer; and
an adhesive layer formed on the inorganic protective film and bonding the moisture-proof body to the substrate.
2. The detector according to claim 1 , wherein the organic resin protective layer is formed from a thermoplastic organic resin.
3. The detector according to claim 1 , wherein the inorganic protective film is formed from one of silicon nitride, silicon oxide, silicon carbide, and a composite material thereof.
4. The detector according to claim 3 , wherein the adhesive layer is formed from a UV curable adhesive.
5. The detector according to claim 1 , wherein the adhesive layer is formed from a UV curable adhesive.
6. The detector according to claim 1 , further comprising:
a reflective film formed between the scintillator layer and the moisture-proof body and configured to reflect the fluorescence.