Actuator and method for driving the same
View Patent ↗Provided is a novel actuator and a method for driving the same. The present invention is an actuator comprising a first laminate comprising a first (Bi, Na, Ba) TiO 3 layer between first and second electrode layers, a second laminate comprising a second (Bi, Na, Ba) TiO 3 layer between third and fourth electrode layers, and a tilt part provided between the first and second laminates. Both of the first and second (Bi, Na, Ba) TiO 3 layers are preferentially oriented in a [011] crystalline axis direction. Voltages V 5 a , V 9 a , V 5 b , and V 9 b which satisfy Requirement A: V 5 a >V 9 a and V 5 b <V 9 b or Requirement B: V 5 a <V 9 a and V 5 b >V 9 b are applied to the first-fourth electrode layers so as to tilt the tilt part. One of the first edge and the second edge is moved in the [011] crystalline axis direction and the other is moved in the reverse direction thereof.
1. A method for driving an actuator, the method comprising steps of:
a step (a) of preparing the actuator comprising:
a first laminate;
a second laminate;
a first support;
a second support; and
a tilt part, wherein
the first laminate comprises a first electrode layer, a first (Bi, Na, Ba) TiO 3 layer, and a second electrode layer,
the first electrode layer, the first (Bi, Na, Ba) TiO 3 layer, and the second electrode layer are laminated in such a manner that the first (Bi, Na, Ba) TiO 3 layer is interposed between the first electrode layer and the second electrode layer,
the first (Bi, Na, Ba) TiO 3 layer is preferentially oriented in a [011] crystalline axis direction,
+Z direction is parallel to the [011] crystalline axis direction,
−Z direction is the reverse direction of the +Z direction,
+X direction is parallel to the longitudinal direction of the first laminate,
−X direction is the reverse direction of the +X direction,
+Y direction is perpendicular to both of the +X direction and the +Z direction in a right-handed coordinate system,
−Y direction is the reverse direction of the +Y direction,
the laminate direction of the first laminate is parallel to the +Z direction,
the second laminate comprises a third electrode layer, a second (Bi, Na, Ba) TiO 3 layer, and a fourth electrode layer,
the second (Bi, Na, Ba) TiO 3 layer is preferentially oriented in the [011] crystalline axis direction,
the second (Bi, Na, Ba) TiO 3 layer is interposed between the third electrode layer and the fourth electrode layer along the +Z direction,
the tilt part is interposed between the first laminate and the second laminate along the +X direction,
the tilt part comprises a first edge and a second edge,
the first edge and the second edge are located in the +Y side and the −Y side, respectively, in the XY plane,
one end of the first laminate is fixed to the first support,
one end of the second laminate is fixed to the second support, and
in the XY plane, an angular degree Q formed between the +X direction and a [100] direction is more than 0 degrees and less than 90 degrees, and
a step (b) of applying the voltages V 5 a , V 9 a , V 5 b , and V 9 b which satisfy the following requirement A or B to the first electrode layer, the second electrode layer, the third electrode layer, and the fourth electrode layer, respectively, so as to tilt the tilt part in such a manner that one of the first edge and the second edge is moved in the +Z direction and the other is moved in the −Z direction;
Requirement A: V 5 a >V 9 a and V 5 b <V 9 b
Requirement B: V 5 a <V 9 a and V 5 b >V 9 b.
2. The method according to claim 1 , wherein
in the step (b), the requirement A is satisfied; and
the first edge is moved in the −Z direction and the second edge is moved in the +Z direction.
3. The method according to claim 1 , wherein
in the step (b), the requirement B is satisfied; and
the first edge is moved in the +Z direction and the second edge is moved in the −Z direction.
4. The method according to claim 1 , wherein
the angular degree Q is not less than 15 degrees and not more than 75 degrees.
5. The method according to claim 1 , wherein
the angular degree Q is not less than 30 degrees and not more than 60 degrees.
6. The method according to claim 1 , wherein
the first electrode layer is formed integrally with the third electrode layer.
7. The method according to claim 1 , wherein
the first (Bi, Na, Ba) TiO 3 layer is formed integrally with the second (Bi, Na, Ba) TiO 3 layer.
8. The method according to claim 1 , wherein
the first (Bi, Na, Ba) TiO 3 layer is formed of (Bi 0.5 Na) 0.5 TiO 3 —BaTiO 3 ; and
the second (Bi, Na, Ba) TiO 3 layer is formed of (Bi 0.5 Na) 0.5 TiO 3 —BaTiO 3 .
9. The method according to claim 1 , wherein
the first (Bi, Na, Ba) TiO 3 layer is formed of a laminate of a (1−x)(Bi 0.5 ,Na 0.5 )TiO 3 )−x(BaTiO 3 ) layer (0.01≦x≦0.15) and a (1−y)[(Bi,Na,Ba)TiO 3 ]−yBiFeO 3 layer (0.20≦y≦0.50); and
the second (Bi, Na, Ba) TiO 3 layer is formed of a laminate of a (1−x)(Bi 0.5 ,Na 0.5 )TiO 3 )−x(BaTiO 3 ) layer (0.01≦x≦0.15) and a (1−y)[(Bi,Na,Ba)TiO 3 ]−yBiFeO 3 layer (0.20≦y≦0.50).
10. An actuator comprising:
a first laminate;
a second laminate;
a first support;
a second support; and
a tilt part, wherein
the first laminate comprises a first electrode layer, a first (Bi, Na, Ba) TiO 3 layer, and a second electrode layer;
the first electrode layer, the first (Bi, Na, Ba) TiO 3 layer, and the second electrode layer are laminated in such a manner that the first (Bi, Na, Ba) TiO 3 layer is interposed between the first electrode layer and the second electrode layer;
the first (Bi, Na, Ba) TiO 3 layer is preferentially oriented in a [011] crystalline axis direction;
+Z direction is parallel to the [011] crystalline axis direction;
−Z direction is the reverse direction of the +Z direction;
+X direction is parallel to the longitudinal direction of the first laminate;
−X direction is the reverse direction of the +X direction;
+Y direction is perpendicular to both of the +X direction and the +Z direction in a right-handed coordinate system;
−Y direction is the reverse direction of the +Y direction;
the laminate direction of the first laminate is parallel to the +Z direction;
the second laminate comprises a third electrode layer, a second (Bi, Na, Ba) TiO 3 layer, and a fourth electrode layer;
the second (Bi, Na, Ba) TiO 3 layer is preferentially oriented in the [011] crystalline axis direction;
the second (Bi, Na, Ba) TiO 3 layer is interposed between the third electrode layer and the fourth electrode layer along the +Z direction;
the tilt part is interposed between the first laminate and the second laminate along the +X direction;
the tilt part comprises a first edge and a second edge;
the first edge and the second edge are located in the +Y side and the −Y side, respectively, in the XY plane;
one end of the first laminate is fixed to the first support;
one end of the second laminate is fixed to the second support and;
in the XY plane, an angular degree Q formed between the +X direction and a [100] direction is more than 0 degrees and less than 90 degrees.
11. The actuator according to claim 10 , wherein
the angular degree Q is not less than 15 degrees and not more than 75 degrees.
12. The actuator according to claim 10 , wherein
the angular degree Q is not less than 30 degrees and not more than 60 degrees.
13. The actuator according to claim 10 , wherein
the first electrode layer is formed integrally with the third electrode layer.
14. The actuator according to claim 10 , wherein
the first (Bi, Na, Ba) TiO 3 layer is formed integrally with the second (Bi, Na, Ba) TiO 3 layer.
15. The actuator according to claim 10 , wherein
the first (Bi, Na, Ba) TiO 3 layer is formed of (Bi 0.5 Na) 0.5 TiO 3 —BaTiO 3 ; and
the second (Bi, Na, Ba) TiO 3 layer is formed of (Bi 0.5 Na) 0.5 TiO 3 —BaTiO 3 .
16. The actuator according to claim 10 , wherein
the first (Bi, Na, Ba) TiO 3 layer is formed of a laminate of a (1−y)(Bi 0.5 ,Na 0.5 )TiO 3 )−x(BaTiO 3 ) layer (0.01≦x≦0.15) and a (1−y)[(Bi,Na,Ba)TiO 3 ]−yBiFeO 3 layer (0.20≦y≦0.50); and
the second (Bi, Na, Ba) TiO 3 layer is formed of a laminate of a (1−y)(Bi 0.5 ,Na 0.5 )TiO 3 )−x(BaTiO 3 ) layer (0.01≦x≦0.15) and a (1−y)[(Bi,Na,Ba)TiO 3 ]−yBiFeO 3 layer (0.20≦y≦0.50).