Method of manufacturing a flexible circuit electrode array
Polymer materials make useful materials as electrode array bodies for neural stimulation. They are particularly useful for retinal stimulation to create artificial vision. Regardless of which polymer is used, the basic construction method is the same. A layer of polymer is laid down. A layer of metal is applied to the polymer and patterned to create electrodes and leads for those electrodes. A second layer of polymer is applied over the metal layer and patterned to leave openings for the electrodes, or openings are created later by means such as laser ablation. Hence the array and its supply cable are formed of a single body.
1. A method of making a flexible circuit electrode array for neural stimulation comprising:
depositing a polymer base layer;
depositing a metal layer comprising layers of titanium and platinum on the polymer base layer;
depositing photoresist on the metal layer;
exposing the photoresist;
patterning the metal by wet etch with Aqua Regia to form metal traces
activating the polymer base layer by deimidization; and
depositing a polymer top layer on the polymer base layer and the metal traces.
2. The method according to claim 1 , wherein the step of depositing metal includes first depositing titanium, then depositing platinum and then depositing a second layer of titanium.
3. The method according to claim 1 , wherein the step of patterning forms metal traces, electrodes and bond pads.
4. The method according to claim 3 , further comprising creating openings in the polymer base layer or the polymer top layer to exposes the electrodes and the bond pads.
5. The method according to claim 4 , wherein creating openings is by laser ablation.
6. The method according to claim 1 , wherein activation further comprises RIE etch.
7. The method according to claim 1 , wherein the polymer base layer is polyimide.
8. The method according to claim 1 , wherein depositing the polymer base layer comprises spin coating polymeric acid and curing the polymeric acid between 80-150° C. and then between 230-350° C.
9. The method according to claim 1 , wherein the flexible circuit electrode array is adapted to stimulate visual neurons and create the precept of light.
10. The method according to claim 9 , wherein the visual neurons are retinal neurons.