Carbon based biosensors and processes of manufacturing the same
Sensors, processes for manufacturing the sensors, and processes of detecting a target molecule with the sensor generally includes a substrate including a channel and first and second electrodes electrically connected to the channel, wherein the channel includes a monolayer of surface functionalized graphene or surface functionalized carbon nanotubes, wherein the surface functionalized graphene or surface functionalized carbon nanotubes include an imidazolidone compound.
1. A process of manufacturing a sensor device, the process comprising:
overlaying a dielectric layer onto a substrate;
depositing graphene or carbon nanotubes onto the dielectric layer;
forming a source electrode and a drain electrode on the substrate such that the graphene or carbon nonotubes layer defines a channel therebetween and is electrically connected to the source and drain electrodes; and
functionalizing a surface of the graphene or carbon nanotubes with an imidazolidone compound, wherein the imidazolidone compound is of formula (1):
wherein R 1 and R 2 are each independently selected from the group consisting of hydrogen, an alkyl group with 1 to 16 carbon atoms, an amine group, an alkylamine group, an aldehyde group and a carboxylic acid and an ester.
2. The process of claim 1 , wherein depositing the graphene onto the dielectric layer comprises mechanically exfoliating the graphene onto the dielectric layer from natural graphite.
3. The process of claim 1 , wherein depositing the carbon nanotubes onto the dielectric layer comprises functionalizing the carbon nanotubes with a functional group reactive with a surface of the dielectric layer; and annealing to remove unreacted functional groups so as to form a monolayer layer of the carbon nanotubes on the dielectric layer.
4. The process of claim 1 , wherein the carbon nanotubes comprise single walled carbon nanotubes.
5. The process of claim 1 , wherein the carbon nanotubes comprise multi-walled carbon nanotubes.
6. The process of claim 1 , wherein the carbon nanotubes have an aspect ratio of about 5 or greater.
7. The process of claim 1 , wherein depositing the graphene or the carbon nanotubes onto the dielectric layer forms a monolayer.
8. The process of claim 1 , wherein depositing the graphene onto the dielectric layer comprises a mechanical exfoliation process or a chemical vapor deposition process.
9. The process of claim 1 , wherein the channel has a length of 50 nanometers to 1000 nanometers.
10. The process of claim 1 , wherein the sensor device is configured to provide a change in conductance upon binding of the target molecules to the probe molecules.
11. The process of claim 1 , further comprising annealing the substrate.
12. A process of manufacturing a sensor device, the process comprising:
overlaying a dielectric layer onto a substrate;
depositing graphene or carbon nanotubes onto the dielectric layer;
forming a source electrode and a drain electrode on the substrate such that the grapheme or carbon nanotubes layer defines a channel therebetween and is electrically connected to the source and drain electrodes; and
functionalizing a surface of the graphene or carbon nanotubes with an imidazolidone compound, wherein the imidazolidone compound is of formula (II):
wherein R 3 and R 4 are each independently selected from the group consisting of hydrogen, an alkyl group, an aryl group, and mixtures thereof.
13. The process of claim 12 , wherein depositing the graphene onto the dielectric layer comprises mechanically exfoliating the graphene onto the dielectric layer from natural graphite.
14. The process of claim 12 , wherein depositing the carbon nanotubes onto the dielectric layer comprises functionalizing the carbon nanotubes with a functional group reactive with a surface of the dielectric layer; and annealing to remove unreacted functional groups so as to form a monolayer layer of the carbon nanotubes on the dielectric layer.
15. The process of claim 12 , wherein depositing the graphene or the carbon nanotubes onto the dielectric layer forms a monolayer.
16. The process of claim 12 , wherein depositing the graphene onto the dielectric layer comprises a mechanical exfoliation process or a chemical vapor deposition process.
17. The process of claim 15 , further comprising annealing the substrate.