MEMS devices anti-stiction coating and encapsulant having opposing water resitive characteristics
View Patent ↗Disclosed is an isolation mechanism and technique for packaging a MEMS transducer, such as a bulk acoustic wave gyroscope or accelerometer, to provide isolation from externally applied (or internally induced) stress, strain, vibration, shock and thermal transients. The disclosed methods and techniques enable the location of voids/air cavity/environmental isolations inside an encapsulant or over mold compound to be custom selected by treating at least a portion of the exterior surfaces of the MEMS device package with anti-stiction coatings to create opposing hydrophobic and hydrophilic conditions which during encapsulant and transfer molding steps create voids or air bubbles in the proximity of the anti-stiction coating due to the opposing water resistive characteristic of encapsulant.
1. A microelectromechanical (MEMS) apparatus comprising:
a MEMS transducer having plurality of exterior surfaces; and
an isolation layer at least partially surrounding at least one of the plurality of exterior surfaces and encompassing a plurality of cavities formed within the isolation layer and adjacent the one of the plurality of exterior surfaces.
2. The MEMS apparatus of claim 1 wherein each of the plurality of cavities formed within the isolation layer is proximate a section of anti-stiction coating disposed on the one of the plurality of exterior surfaces.
3. The MEMS apparatus of claim 1 wherein one of the anti-stiction coating and the isolation layer is hydrophobic and the other of the anti-stiction coating and isolation layer is hydrophilic.
4. A microelectromechanical (MEMS) apparatus comprising:
a MEMS transducer having an exterior surface; and
an isolation layer surrounding the exterior surface and encompassing a plurality of cavities formed within the isolation layer, the plurality of cavities adjacent the exterior surface.
5. The MEMS apparatus of claim 4 further comprising:
an anti-stiction coating disposed on the exterior surface.
6. The MEMS apparatus of claim 4 wherein one of the anti-stiction coating and the isolation layer is hydrophobic and the other of the anti-stiction coating and isolation layer is hydrophilic.
7. A microelectromechanical (MEMS) apparatus comprising:
a MEMS transducer having plurality of exterior surfaces;
an anti-stiction coating disposed on at least a portion of one of the plurality of exterior surfaces; and
a plurality of cavities formed within an isolation-layer surrounding the one of the plurality of exterior surfaces;
wherein one of the anti-stiction coating and the isolation layer is hydrophobic and the other of the anti-stiction coating and isolation layer is hydrophilic.
8. The MEMS apparatus of claim 7 , further comprising a plurality of anti-stiction coatings disposed on a plurality of portions of said one of the plurality of exterior surfaces.
9. The MEMS apparatus of claim 8 , wherein each of the plurality of cavities surrounds one of the plurality of anti-stiction coatings.
10. The MEMS apparatus of claim 7 further comprising a plurality of anti-stiction coatings disposed on multiple of the plurality of exterior surfaces.
11. The MEMS apparatus of claim 7 wherein the isolation layer is hydrophilic.
12. The MEMS apparatus of claim 7 wherein the anti-stiction coating is hydrophobic.