Method of forming a fully wrapped-around shielded PMR writer pole
View Patent ↗A method of forming a wrapped-around shielded perpendicular magnetic recording writer pole is disclosed. A structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer is provided, the intermediate layer comprising a pole material and a dielectric material. A trench is formed in the dielectric material. A non-magnetic layer in the trench is removed via an ion beam etching process. A seed layer is deposited in the trench and over the pole material. A magnetic material comprising a side shield layer is deposited on at least a portion of the seed layer.
1. A method of forming a wrapped-around shielded perpendicular magnetic recording writer pole, the method comprising:
providing a structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer, the intermediate layer comprising a pole material and a dielectric material;
forming a trench in the dielectric material by forming a first patterned mask layer having a first patterned opening over the intermediate layer, and removing a portion of the dielectric material below the first patterned opening, wherein a non-magnetic layer is formed in the trench during formation of the trench, the non-magnetic layer comprising an oxidized portion of a top surface of the leading shield layer;
removing the non-magnetic layer in the trench via an ion beam etching process;
depositing a seed layer in the trench and over the pole material; and
depositing a magnetic material comprising a side shield layer on at least a portion of the seed layer.
2. The method of claim 1 , wherein the portion of the dielectric material is removed via a wet etching process.
3. The method of claim 1 , wherein the non-magnetic layer further comprises a photoresist residue.
4. The method of claim 1 , wherein the seed layer is deposited over an entire wafer comprising the structure.
5. A method of forming a wrapped-around shielded perpendicular magnetic recording writer pole, the method comprising:
providing a structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer, the intermediate layer comprising a pole material and a dielectric material;
forming a trench in the dielectric material, wherein a non-magnetic layer is formed in the trench during formation of the trench;
removing the non-magnetic layer in the trench via an ion beam etching process;
depositing a seed layer in the trench and over the pole material; and
depositing a magnetic material comprising a side shield layer on at least a portion of the seed layer,
wherein the structure is tilted during the ion beam etching process.
6. The method of claim 5 further comprising forming a second patterned mask having a second patterned opening over a region of the dielectric material and over a region of the leading shield layer, wherein the magnetic material is deposited via the second patterned opening of the second patterned mask.
7. The method of claim 6 , wherein the seed layer is deposited via a chemical vapor deposition (CVD) process.
8. The method of claim 6 , wherein the seed layer is deposited via a physical vapor deposition (PVD) process.
9. The method of claim 8 , wherein the PVD process is an ion beam deposition process.
10. The method of claim 9 , wherein the structure is tilted during the ion beam deposition process.
11. The method of claim 10 , wherein the ion beam etching process is performed on the structure in a first vacuum chamber, and the ion beam deposition process is performed on the structure in a second vacuum chamber after the structure has been transferred from the first vacuum chamber to the second vacuum chamber.
12. The method of claim 11 , wherein the structure is maintained substantially in a vacuum condition while the structure is transferred from the first vacuum chamber to the second vacuum chamber.