IP Library Granted Patent US 9,590,163
Granted Patent B2
US 9,590,163 · App. 13/976,969 · Granted Mar 7, 2017

Electronic component and method for producing the electronic component

Inventors: Edgar Schmidhammer (Stein An Der Traun, DE); Gudrun Henn (Ebenhausen, DE)
Assignee: EPCOS AG
H01L41/0478H01L41/047H01L41/0477H01L41/08H03H9/02
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Quick Facts
Patent No.
US 9,590,163
App. No.
13/976,969
Granted
Mar 7, 2017
Kind
B2
Abstract

The invention relates to an electronic component having a layer sequence, which comprises at least a first electrode ( 10 ), a second electrode ( 20 ) and an active region ( 30 ) and contains monoatomic carbon layers at least in sub-regions.

Claims (22)

1. An electroacoustic component having a layer sequence, the layer sequence comprising:

a first electrode;

a second electrode; and

an active region, which is electrically coupled to the first electrode and the second electrode,

wherein the layer sequence includes graphene at least in partial regions,

wherein the graphene is arranged as monolayers or as multilayers, and

wherein the active region comprises a piezoelectric layer.

2. The electroacoustic component according to claim 1 , wherein the layer sequence further comprises reflective layers.

3. The electroacoustic component according to claim 1 or 2 , wherein the first electrode or the second electrode or a reflective layer contains monoatomic carbon layers at least in partial regions.

4. The electroacoustic component according to claim 1 , wherein the first and second electrodes are arranged on one side of the piezoelectric layer or on mutually opposite sides of the piezoelectric layer.

5. The electroacoustic component according to claim 4 , wherein the first or the second electrode comprises a plurality of layers arranged one above another, at least one layer of which contains monoatomic carbon layers.

6. The electroacoustic component according to claim 5 , wherein the at least one layer of the first or second electrode which contains monoatomic carbon layers is combined with at least one layer containing a material selected from a group comprising Ti, Mo, mixtures of Ti and Mo, Ru, Pt, W, Al, Cu and mixtures of Al and Cu.

7. The electroacoustic component according to claim 2 , further comprising:

at least one first reflective layer having a high acoustic impedance;

at least one second reflective layer having a low acoustic impedance; and

a substrate, wherein the at least one first reflective layer and the at least one second reflective layer are arranged between the substrate and the first electrode.

8. The electroacoustic component according to claim 7 , wherein the at least one second reflective layer has chemically modified monoatomic carbon layers.

9. The electroacoustic component according to claim 8 , wherein the at least one second reflective layer is electrically insulating.

10. The electroacoustic component according to one of claims 7 to 9 , wherein the at least one first reflective layer contains W.

11. The electroacoustic component according to claim 7 , wherein the at least one second reflective layer is arranged between the at least one first reflective layer and the first electrode.

12. The electroacoustic component according to claim 11 , which is embodied as a surface-acoustic-wave-based component, as a bulk-acoustic-wave-based component or as a microelectro-mechanical component.

13. A method for producing an electroacoustic component according to claim 1 , wherein the graphene is applied by means of a method selected from a group comprising chemical vapor deposition, physical vapor deposition, application in solution and chemical surface reactions.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 2, 2017
From: EPCOS AG
To: SNAPTRACK, INC.
Reel/Frame 041608/0145 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 6, 2013
From: SCHMIDHAMMER, EDGAR, DR.; HENN, GUDRUN
To: EPCOS AG
Reel/Frame 031155/0781 →
Priority Claims (1)
DE 10 2010 056 572 · Dec 30, 2010 · national
Continuity (1)
Related Publication 20130342079A1 · Dec 26, 2013