Adhesive composition for a wafer processing film
The present invention relates to an adhesive composition for a wafer processing film, a wafer processing film, and a semiconductor wafer processing method. In the semiconductor wafer processing process such as a dicing process or a back grinding process, a delaminating force with respect to a wafer to be attached may be effectively reduced to improve process efficiency and prevent the wafer from being warped or cracked.
1. An adhesive composition for a wafer processing film, the composition comprising:
an acrylic polymer; and
a photosensitive gas generating agent,
wherein the photosensitive gas generating agent comprises an ester of 2-diazonaphtolsulfonic acid; and
wherein the photosensitive gas generating agent comprises at least one selected from the group consisting of novolac 2-diazo-1-naphthol-5-sulfonate, 2,3,4-trihydroxy benzophenone 2-diazo-1-naphthol-5-sulfonate, and 2,3,4,4′-tetrahydroxy benzophenone 2-diazo-1-naphthol-5-sulfonate.
2. The adhesive composition according to claim 1 , wherein the acrylic polymer has a glass transition temperature of −50° C. to 15° C.
3. The adhesive composition according to claim 1 , wherein the acrylic polymer has a weight average molecular weight of 50,000 to 1,000,000.
4. The adhesive composition according to claim 1 , wherein the acrylic polymer comprises:
90 parts by weight to 99.9 parts by weight of a (meth)acrylic acid ester monomer; and
0.1 part by weight to 10 parts by weight of a copolymerizable monomer having a crosslinkable functional group, in a polymerized form.
5. The adhesive composition according to claim 4 , wherein the crosslinkable functional group comprises a hydroxyl group, a carboxyl group, an amide group, a glycidyl group, or an isocyanate group.
6. The adhesive composition according to claim 1 , wherein the photosensitive gas generating agent is present in an amount of 0.5 parts by weight to 30 parts by weight based on 100 parts by weight of the acrylic polymer.
7. The adhesive composition according to claim 1 , further comprising:
a polyfunctional crosslinking agent.
8. A wafer processing film, comprising:
a substrate; and
an adhesive layer formed on one or both sides of the substrate and comprising an acrylic polymer and a photosensitive gas generating agent,
wherein the photosensitive gas generating agent comprises an ester of 2-diazonaphtholsulfonic acid; and
wherein the photosensitive gas generating agent comprises at least one selected from the group consisting of novolac 2-diazo-1-naphthol-5-sulfonate, 2,3,4-trihydroxy benzophenone 2-diazo-1-naphthol-5-sulfonate, and 2,3,4,4′-tetrahydroxy benzophenone 2-diazo-1-naphthol-5-sulfonate.
9. The wafer processing film according to claim 8 , wherein the substrate has a thickness of 10 μm to 500 μm.
10. The wafer processing film according to claim 8 , wherein the adhesive layer has a thickness of 0.5 μm to 50 μm.
11. The wafer processing film according to claim 8 , further comprising:
a release film formed on the adhesive layer.
12. A method of processing a semiconductor wafer, comprising:
attaching the wafer processing film according to claim 8 to a semiconductor wafer;
processing the semiconductor wafer to which the wafer processing film is attached; and
irradiating the wafer processing film with ultraviolet light.
13. The method according to claim 12 , wherein the processing the semiconductor wafer comprises a dicing process or a back-grinding process.
14. The method according to claim 12 , wherein the irradiating the wafer processing film with ultraviolet light is performed by radiating ultraviolet light at a wavelength of 200 nm to 400 nm and a light intensity of 5 mW/cm 2 to 200 mW/cm 2 for 5 seconds to 60 seconds.
15. The method according to claim 12 , further comprising:
delaminating the semiconductor wafer from the wafer processing film after the ultraviolet light radiation.
16. The wafer processing film according to claim 8 , wherein the adhesive layer has a gel content of 80% to 99%,
wherein the gel content is a value obtained by the following Expression 1:
Gel content (%)= B/A× 100, [Expression 1]
where
A is a mass of a cured adhesive composition, and
B is a dry mass of undissolved powder collected after curing the adhesive composition and 48 hours at room temperature after depositing the adhesive composition.