Optoelectronic semiconductor chip and method for producing optoelectronic semiconductor chips
View Patent ↗An optoelectronic semiconductor chip has a semiconductor body and a substrate on which the semiconductor body is disposed. The semiconductor body has an active region disposed between a first semiconductor layer of a first conductor type and a second semiconductor layer of a second conductor type. The first semiconductor layer is disposed on the side of the active region facing the substrate. The first semiconductor layer is electrically conductively connected to a first termination layer that is disposed between the substrate and the semiconductor body. An encapsulation layer is disposed between the first termination layer and the substrate and, in plan view of the semiconductor chip, projects at least in some regions over a side face which delimits the semiconductor body.
1. An optoelectronic semiconductor chip comprising:
a semiconductor body;
a carrier, on which the semiconductor body is arranged; and
an encapsulation layer;
wherein the semiconductor body has an active region arranged between a first semiconductor layer of a first conduction type and a second semiconductor layer of a second conduction type that differs from the first conduction type;
wherein the first semiconductor layer is arranged on a side of the active region that faces the carrier;
wherein the first semiconductor layer is electrically conductively connected to a first connection layer, which is arranged between the carrier and the semiconductor body;
wherein the encapsulation layer is arranged between the first connection layer and the carrier;
wherein the encapsulation layer, in a plan view of the semiconductor chip, projects at least in regions beyond a side face that delimits the semiconductor body;
wherein the semiconductor body, in a plan view of the semiconductor chip, is arranged completely within an outer boundary of the encapsulation layer;
wherein an outer boundary of the first connection layer, in a plan view of the semiconductor chip, runs completely within the semiconductor body;
wherein the encapsulation layer is metallic and in regions directly adjoins the first semiconductor layer; and
wherein the semiconductor body has a recess which extends from the carrier through the active region, the second semiconductor layer being electrically conductively connected to a second connection layer in the recess.
2. The semiconductor chip according to claim 1 , wherein the encapsulation layer runs fully circumferentially around the semiconductor body.
3. The semiconductor chip according to claim 1 , wherein the encapsulation layer adjoins the first semiconductor layer fully circumferentially along the side face of the semiconductor body.
4. The semiconductor chip according to claim 1 , wherein a main extension plane of a region of the encapsulation layer that projects beyond the side face of the semiconductor body runs parallel to a main extension plane of the active region.
5. The semiconductor chip according to claim 1 , wherein the first connection layer contains silver, palladium or aluminum and the encapsulation layer comprises a gold layer.
6. The semiconductor chip according to claim 1 , wherein the encapsulation layer completely covers the first connection layer on the side facing away from the semiconductor body.
7. The semiconductor chip according to claim 1 , wherein the first connection layer is arranged in regions between the semiconductor body and the second connection layer.
8. The semiconductor chip according to claim 1 , wherein the encapsulation layer directly adjoins the first connection layer and completely covers those regions of a main face of the semiconductor body facing the carrier in which the main face is not covered by the first connection layer, and directly adjoins the main face.