Sensor

1. A sensor comprising:

a circuit board having a first electrode;

a wiring connection layer having a main surface and a back surface opposite to the main surface, the wiring connection layer having a second electrode and a third electrode, the second electrode being provided at the main surface, the third electrode being provided at the back surface;

a sensor element having a fourth electrode; and

a support base having a surface having a recess provided therein,

wherein the first electrode is connected electrically with the second electrode,

wherein the third electrode is connected electrically with the fourth electrode,

wherein the second electrode is connected electrically with the third electrode,

wherein the sensor element has an electrode-bearing surface having a movable portion and the fourth electrode which are provided at the electrode-bearing surface,

wherein the electrode-bearing surface of the sensor element faces the back surface of the wiring connection layer,

wherein the wiring connection layer further has a fifth electrode provided at the back surface, and the fifth electrode is closer to an edge of the wiring connection layer than the third electrode is,

wherein the support base has a sixth electrode provided at the surface of the support base,

wherein the fifth electrode and the sixth electrode are connected such that the sensor element is accommodated in the recess of the support base, and

wherein the recess of the support base is sealed.

2. The sensor according to claim 1 , wherein the support base has a through-hole passing therethrough, the through-hole being connected with the recess so as to allow the recess to communicate with an outside of the recess, the sensor further comprising a barrier membrane that closes the through-hole and allows only gas to pass through the barrier membrane.

3. The sensor according to claim 1 , further comprising a resin that covers an upper surface and a side surface of the circuit board and an upper surface of the support base.

4. An angular velocity sensor comprising:

a substrate;

a circuit board disposed on the substrate, the circuit board having a first electrode;

a wiring connection layer having a main surface and a back surface opposite to the main surface, the wiring connection layer having a second electrode and a third electrode, the second electrode being provided at the main surface, the third electrode being provided at the back surface; and

a sensor element to detect an angular velocity, the sensor element having a fourth electrode;

wherein the first electrode is connected electrically with the second electrode,

wherein the third electrode is connected electrically with the fourth electrode,

wherein the second electrode is connected electrically with the third electrode,

wherein the surface of the sensor element faces the back surface of the wiring connection layer,

wherein the wiring connection layer further has a fifth electrode provided at the back surface,

wherein a metal wire is connected electrically to the fifth electrode,

wherein the sensor element has a movable portion,

wherein a recess portion is formed on the back surface of the wiring connection layer facing the movable portion, and

wherein the wiring connection layer further includes a metal member which is disposed in a region of the wiring connection layer surrounded by the third electrodes and the fifth electrodes.

5. The angular velocity sensor according to claim 4 , wherein the movable portion comprises a driving electrode or a detection electrode.

6. The angular velocity sensor according to claim 4 , wherein the sensor element comprises a piezoelectric material and an electrode disposed on the piezoelectric material.

7. The angular velocity sensor according to claim 6 , wherein a displacement of the sensor element due to Coriolis force caused by an angular velocity applied to the sensor element is detected as an electric charge generated by the piezoelectric material.

8. The angular velocity sensor according to claim 4 , wherein the recess is provided in the wiring connection layer in a portion where no electrodes are provided.

9. The angular velocity sensor according to claim 4 , wherein the third electrode and the fifth electrode are disposed substantially at the same height above the substrate, and a bottom surface of the recess portion is disposed at lower height than the height of the third electrode and the fifth electrode.

10. The angular velocity sensor according to claim 4 , wherein the movable portion comprises at least four arms.

11. An angular velocity sensor comprising:

a substrate;

a circuit board disposed on the substrate, the circuit board having first electrodes;

a wiring connection layer having a main surface and a back surface opposite to the main surface, the wiring connection layer having second electrodes and third electrodes, the second electrodes being provided at the main surface, the third electrodes being provided at the back surface; and

a sensor element to detect an angular velocity, the sensor element having fourth electrodes;

wherein the first electrodes are connected electrically with the second electrodes respectively,

wherein the third electrodes are connected electrically with the fourth electrodes respectively,

wherein the second electrodes are connected electrically with the third electrode,

wherein the surface of the sensor element faces the back surface of the wiring connection layer,

wherein the wiring connection layer further has fifth electrodes provided at the back surface,

wherein metal wires are connected electrically to the fifth electrodes,

wherein the sensor element has a movable portion,

wherein the wiring connection layer further has a metal member having a frame shape, and

wherein the metal member is disposed in a region of the wiring connection layer surrounded by the third electrodes and the fifth electrodes.

12. The angular velocity sensor according to claim 11 , wherein an inner region of the metal member faces the movable portion.

13. The angular velocity sensor according to claim 11 , wherein the movable portion comprises a driving electrode or a detection electrode.

14. The angular velocity sensor according to claim 11 , wherein the sensor element comprises a piezoelectric material and an electrode disposed on the piezoelectric material.

15. The angular velocity sensor according to claim 11 , wherein a displacement of the sensor element due to Coriolis force caused by an angular velocity applied to the sensor element is detected as an electric charge generated by the piezoelectric material.

16. The angular velocity sensor according to claim 11 , wherein the movable portion comprises at least four arms.