Optoelectronic semiconductor chip and method for producing an optoelectronic semiconductor chip
View Patent ↗An optoelectronic semiconductor chip has an epitaxial layer sequence. A doped epitaxial layer of the epitaxial layer sequence has a first region and a second region and a protected structure. The first region of the doped epitaxial layer completely covers the protected structure. The outer surface of the doped epitaxial layer has a first roughness in the first region and a second roughness in the second region.
1. An optoelectronic semiconductor chip comprising:
an epitaxial layer sequence comprising a doped epitaxial layer comprising a first region and a second region and a protected structure,
wherein the first region of the doped epitaxial layer completely covers the protected structure, and
wherein an outer surface of the doped epitaxial layer has a first roughness in the first region and a second roughness in the second region.
2. The optoelectronic semiconductor chip according to claim 1 , wherein the first roughness is formed by depressions having depths of less than approximately 0.5 μm, voids and surface defects.
3. The optoelectronic semiconductor chip according to claim 2 , wherein the depressions comprise hole-shaped depressions.
4. The optoelectronic semiconductor chip according to claim 1 , wherein the first roughness is formed by pyramidal depressions having etching depths of up to approximately 1 μm.
5. The optoelectronic semiconductor chip according to claim 1 , wherein the second roughness is formed by pyramidal depressions having etching depths of approximately 0.5 μm to approximately 4 μm.
6. The optoelectronic semiconductor chip according to claim 5 , wherein the first roughness is formed by pyramidal depressions having etching depths of up to approximately 1 μm.
7. The optoelectronic semiconductor chip according to claim 1 , wherein at least one of the first roughness and the second roughness is formed by pyramidal depressions having side faces, which form an angle of 35° to 75° with a plane of the epitaxial layer sequence.
8. The optoelectronic semiconductor chip according to claim 7 , wherein the side faces form an angle of 50° to 70° with the plane of the epitaxial layer sequence.
9. The optoelectronic semiconductor chip according to claim 1 , wherein the protected structure comprises at least one contact recess that traverses the epitaxial layer sequence parallel to a growth direction thereof and produces an electrical contact with the doped epitaxial layer.
10. The optoelectronic semiconductor chip according to claim 1 , wherein the protected structure comprises a circumferential edge of the epitaxial layer sequence.
11. The optoelectronic semiconductor chip according to claim 1 , wherein the doped epitaxial layer is n-doped.
12. The optoelectronic semiconductor chip according to claim 1 , wherein the first region is covered by a protective mask.
13. The optoelectronic semiconductor chip according to claim 1 , wherein the optoelectronic semiconductor chip further comprises a protective mask, wherein the protective mask is applied on the outer surface above the protected structure.
14. The optoelectronic semiconductor chip according to claim 1 , wherein the optoelectronic semiconductor chip comprises a multiplicity of first regions, a multiplicity of second regions, and a multiplicity of protected structures, wherein each first region is assigned to a protected structure in a one-to-one manner.
15. The optoelectronic semiconductor chip according to claim 14 , wherein each first region is laterally enclosed by second regions.
16. A method for producing an optoelectronic semiconductor chip, the method comprising:
providing an epitaxial layer sequence comprising a doped epitaxial layer having an outer surface;
applying a structured protective mask to the outer surface; and
etching the doped epitaxial layer, wherein the protective mask is applied on the outer surface above the at least one contact recess, wherein a first region having a first roughness remains on the outer surface covered by the protective mask, and wherein a second region having a second roughness is produced on that region of the outer surface which is not covered by the protective mask.
17. The method according to claim 16 , wherein the protective mask is applied on the outer surface above a circumferential edge of the epitaxial layer sequence.
18. The method according to claim 16 , further comprising removing the protective mask after the doped epitaxial layer has been etched.
19. The method according to claim 18 , further comprising etching the first region of the doped epitaxial layer after the protective mask has been removed.
20. The method according to claim 16 , wherein the protective mask remains on the doped epitaxial layer after etching.
21. An optoelectronic semiconductor chip comprising:
an epitaxial layer sequence comprising a doped epitaxial layer comprising a first region and a second region and a protected structure,
wherein the first region of the doped epitaxial layer completely covers the protected structure,
wherein an outer surface of the doped epitaxial layer has a first roughness in the first region and a second roughness in the second region,
wherein the doped epitaxial layer has a first average thickness in the first region,
wherein second roughness of the second region is formed by depressions in the epitaxial layer, and
wherein at least one depression has a step height parallel to a growth direction greater than the first average thickness.
22. The optoelectronic semiconductor chip according to claim 21 , wherein at least one depression of the second region in a direction parallel to the growth direction extends as far as the protected structure.