Electrically-conductive structure and a production method therefor
An exemplary embodiment of the present invention relates to a conductive structure body that comprises a darkening pattern layer having AlOxNy, and a method for manufacturing the same. The conductive structure body according to the exemplary embodiment of the present invention may prevent reflection by a conductive pattern layer without affecting conductivity of the conductive pattern layer, and improve a concealing property of the conductive pattern layer by improving absorbance. Accordingly, a display panel having improved visibility may be developed by using the conductive structure body according to the exemplary embodiment of the present invention.
1. A conductive structure body, comprising:
a substrate;
a conductive pattern layer; and
an AlOxNy darkening pattern layer (x>0, y>0) satisfying the following Equation 1,
1
<
(
Al
)
at
×
3
(
0
)
at
×
2
+
(
N
)
at
×
3
<
2
,
[
Equation
1
]
wherein x and y mean ratios of numbers of O and N atoms to one Al atom, respectively, in AlOxNy, and (Al)at represents an atomic content (at %) of Al, (O)at represents an atomic content (at %) of O, and (N)at represents an atomic content (at %) of N based on 100% of a content of all atoms represented by AlOxNy in Equation 1, and
wherein surface resistance of the conductive structure body is 1 Ω/square or more and 300 Ω/square or less, and
wherein total reflectance measured in a direction of an opposite surface of a surface of the darkening pattern layer, which is in contact with the conductive pattern layer is 20% or less.
2. The conductive structure body according to claim 1 , wherein an extinction coefficient k of the conductive structure body is 0.2 or more and 2.5 or less.
3. The conductive structure body according to claim 1 , wherein the darkening pattern layer is provided between the conductive pattern layer and the substrate, and the total reflectance measured at a side of the substrate is 20% or less.
4. The conductive structure body according to claim 1 , wherein a brightness value L* of the conductive structure body is 50 or less based on a L*a*b* color value.
5. The conductive structure body according to claim 1 , wherein surface resistance of the darkening layer or the conductive layer of the conductive structure body before patterning is more than 0 Ω/square and 2 Ω/square or less.
6. The conductive structure body according to claim 1 , wherein a thickness of the darkening pattern layer is 10 nm or more and 400 nm or less.
7. The conductive structure body according to claim 1 , wherein a thickness of the darkening pattern layer is 30 nm or more and 300 nm or less.
8. The conductive structure body according to claim 1 , wherein a thickness of the darkening pattern layer is 50 nm or more and 100 nm or less.
9. The conductive structure body according to claim 1 , wherein the darkening pattern layer of the conductive structure body is provided on at least one surface of the conductive pattern layer.
10. The conductive structure body according to claim 1 , wherein the conductive pattern layer includes at least one selected from the group consisting of metal, a metal alloy, metal oxide, metal nitride and mixture thereof.
11. The conductive structure body according to claim 1 , wherein the conductive pattern layer includes at least one selected from the group consisting of silver, aluminum, copper, neodymium, molybdenum, nickel, alloys thereof, oxides thereof, nitrides thereof and mixture thereof.
12. A touch screen panel, comprising:
the conductive structure body according to claim 1 .
13. A display device, comprising:
the conductive structure body according to claim 1 .
14. A solar battery, comprising:
the conductive structure body according to claim 1 .
15. A method for manufacturing a conductive structure body, comprising:
forming a conductive pattern layer on a substrate; and
forming a darkening pattern layer comprising AlOxNy (x>0, y>0) having an atomic ratio represented by the following Equation 1 before, after, or before and after the conductive pattern layer is formed,
1
<
(
Al
)
at
×
3
(
0
)
at
×
2
+
(
N
)
at
×
3
<
2
,
[
Equation
1
]
wherein x and y mean ratios of numbers of O and N atoms to one Al atom, respectively, in AlOxNy, and (Al)at represents an atomic content (at %) of Al, (O)at represents an atomic content (at %) of O, and (N)at represents an atomic content (at %) of N based on 100% of a content of all atoms represented by AlOxNy in Equation 1, and
wherein total reflectance measured in a direction of an opposite surface of a surface of the darkening pattern layer, which is in contact with the conductive pattern layer, is 20% or less, and
wherein surface resistance of the conductive structure body is 1 Ω or more and 300 Ω/square or less.
16. A method for manufacturing a conductive structure body, comprising:
forming a conductive layer on a substrate;
forming a darkening layer comprising AlOxNy (x>0, y>0) having an atomic ratio represented by the following Equation 1 before, after, or before and after the conductive layer is formed; and
separately or simultaneously patterning the conductive layer and the darkening layer,
1
<
(
Al
)
at
×
3
(
0
)
at
×
2
+
(
N
)
at
×
3
<
2
,
[
Equation
1
]
wherein x and y mean ratios of numbers of O and N atoms to one Al atom, respectively, in AlOxNy, and (Al)at represents an atomic content (at %) of Al, (O)at represents an atomic content (at %) of O, and (N)at represents an atomic content (at %) of N based on 100% of a content of all atoms represented by AlOxNy in Equation 1, and
wherein total reflectance measured in a direction of an opposite surface of a surface of the darkening pattern layer, which is in contact with the conductive pattern layer, is 20 % or less, and
wherein surface resistance of the conductive structure body is 1 Ω/square or more and 300 Ω/square of less.
17. The method for manufacturing a conductive structure body according to claim 16 , wherein surface resistance of the conductive layer or the darkening layer is more than 0 Ω/square and 2 Ω/square or less.
18. The method for manufacturing a conductive structure body according to claim 15 , wherein the darkening pattern layer is formed by using a reactive sputtering method.
19. The method for manufacturing a conductive structure body according to claim 18 , wherein the reactive sputtering method satisfies a reaction condition represented by the following Equation 4:
7
(
%
)
≤
con
.
(
N
2
)
con
.
(
Ar
)
+
con
.
(
N
2
)
×
100
(
%
)
≤
15
(
%
)
[
Equation
4
]
wherein con.(Ar) and con.(N 2 ) mean contents of Ar and N 2 in a reaction vessel, respectively.
20. The method for manufacturing a conductive structure body according to claim 16 , wherein the darkening layer is formed by using a reactive sputtering method.
21. The method for manufacturing a conductive structure body according to claim 20 , wherein the reactive sputtering method satisfies a reaction condition represented by the following Equation 4:
7
(
%
)
≤
con
.
(
N
2
)
con
.
(
Ar
)
+
con
.
(
N
2
)
×
100
(
%
)
≤
15
(
%
)
[
Equation
4
]
wherein con. (Ar) and con. (N 2 ) mean contents of Ar and N 2 in a reaction vessel, respectively.