Support for an optoelectronic semiconductor chip, and semiconductor chip
View Patent ↗A support for an optoelectronic semiconductor chip includes a support body with a first main face and a second main face opposite the first main face, at least one electrical plated-through hole extending from the first main face to the second main face and formed in the support body, and an insulating layer arranged on the first main face, the insulation layer covering the electrical plated-through hole only in regions.
1. A support for an optoelectronic semiconductor chip comprising:
a support body having a first main face and a second main face opposite the first main face,
at least one electrical plated-through hole extending from the first main face to the second main face and formed in the support body;
an insulation layer arranged on the first main face, said insulation layer partially covering the electrical plated-through hole;
a connection area formed on a side of the insulation layer facing away from the support body, said connection area being electrically conductively connected to the plated-through hole;
the support has a further plated-through hole electrically conductively connected to a further contact area on the second main face of the support body and to a further connection area on that side of the insulation layer facing away from the support body; and
the further connection area covers the plated-through hole in regions, completely surrounds the connection area in a plan view of the support and is electrically insulated from the connection area and from the plated-through hole.
2. The support according to claim 1 , wherein the support body comprises a semiconductor material.
3. The support according to claim 1 , wherein the support body has a resistivity of at least 500 Ωcm.
4. The support according to claim 1 , wherein a contact area is arranged on the second main face of the support body, said contact area being electrically conductively connected to the plated-through hole.
5. The support according to claim 1 , further comprising another insulation layer arranged between the contact area and the second main face.
6. The support according to claim 1 , wherein a diode structure is formed in the support body, said diode structure adjoining the second main face of the support body.
7. The support according to claim 6 , wherein the diode structure has a first partial region of a first conduction type which encloses a second partial region of a second conduction type in a plan view of the semiconductor chip.
8. The support according to claim 6 , wherein
a contact area electrically conductively connected to the plated-through hole and a further contact area electrically conductively connected to the second plated-through hole are arranged on the second main face;
a diode structure is formed in the support body, said diode structure adjoining the second main face of the support body;
the contact area and the further contact area overlap the diode structure in a plan view of the support; and
the contact area and the further contact area connect to one another via the diode structure.
9. The support according to claim 1 , wherein the support is formed in a support assemblage provided for production of a plurality of semiconductor chips each comprising a support from the support assemblage.
10. A semiconductor chip comprising a support according to claim 1 , wherein a semiconductor body having an active region that generates radiation is arranged on the support on the part of the first main face and is electrically conductively connected to the connection area.
11. The semiconductor chip according to claim 10 , wherein a growth substrate for the semiconductor layer sequence of the semiconductor body comprises a semiconductor layer sequence grown on a growth substrate, wherein the growth substrate is removed.
12. The semiconductor chip according to claim 10 , wherein a side face of the support body is exposed.
13. The semiconductor chip according to claim 10 , wherein a recess is formed in the semiconductor body, said recess extending from the side facing the support through the active region.
14. The support according to claim 1 , wherein the insulation layer is arranged in regions between the plated-through hole and the connection area when viewed in a direction running perpendicular to the first main face.
15. The support according to claim 1 , wherein:
the support body comprises penetrations extending through the support body in a vertical direction, the plated-through hole being arranged in the penetration; and
the connection area is arranged in an opening of the further connection area wherein a cross section of the opening is smaller than a cross section of the penetration.