Pressure sensor having a compressible element
The invention relates to a pressure sensor ( 1, 41 ) comprising a chamber ( 3 ) in which a sensor element ( 4 ) for measuring pressure is arranged. The pressure sensor ( 1, 41 ) further comprises a compressible element ( 6, 7 ) for overpressure protection, said compressible element ( 6, 7 ) being arranged outside the chamber ( 3 ).
1. A pressure sensor, comprising:
a chamber in which a sensor element for measuring a pressure is arranged; and
a compressible element for protecting against excess pressure,
wherein the compressible element is arranged outside the chamber,
wherein the compressible element is at least partially surrounded by a fluid medium,
wherein the compressible element is adapted to decrease its volume when the pressure in the fluid medium rises above a limit pressure, and
wherein the volume is taken up by the fluid medium, leading to a decrease of pressure in the fluid medium.
2. The pressure sensor according to claim 1 , wherein the chamber is bounded by a pressure-sensitive region.
3. The pressure sensor according to claim 1 or 2 , further comprising:
a pressure line, which is fillable with the fluid medium, for directing the pressure of the medium onto the pressure-sensitive region,
wherein the compressible element is arranged on the pressure line.
4. The pressure sensor according to claim 1 , wherein the pressure-sensitive region is in the form of a membrane.
5. The pressure sensor according to claim 4 , wherein the membrane is a metallic membrane.
6. The pressure sensor according to claim 1 , further comprising:
a housing,
wherein the pressure line extends in the housing.
7. The pressure sensor according to claim 6 , wherein the housing has an inner wall which is lined with the compressible element.
8. The pressure sensor according to claim 1 , wherein the pressure line leads through the compressible element.
9. The pressure sensor according to claim 1 , wherein the pressure line extends vertically toward the pressure-sensitive region.
10. The pressure sensor according to claim 1 , wherein the pressure line extends at an inclination angle toward the pressure-sensitive region.
11. The pressure sensor according to claim 1 , wherein the pressure line has sections which have different diameters.
12. The pressure sensor according to claim 11 , wherein the section having the smallest diameter is bounded by the compressible element.
13. The pressure sensor according to claim 1 , wherein the total volume of the compressible elements is at least 50% of the volume of the pressure line.
14. The pressure sensor according to claim 1 , wherein the distance of the compressible element from the pressure-sensitive region is less than or equal to 1000 μm.
15. The pressure sensor according to claim 1 , wherein the chamber is oil-filled.
16. The pressure sensor according to claim 1 , wherein the compressible element is formed from a foam-like or rubber-like material.
17. The pressure sensor according to claim 1 , wherein the chamber is closed by a membrane and the compressible element is located on a different side of the membrane than the sensor element.