Pressure sensor having a compressible element
The invention relates to a pressure sensor ( 1 ) comprising a housing ( 2 ) and a chamber ( 3, 31, 32 ) which is closed off from the exterior and filled with a fluid medium ( 5, 51, 52 ). At least one compressible element ( 6, 7 ) for overpressure protection is arranged inside the chamber ( 3, 31, 32 ).
1. A pressure sensor comprising:
a housing which has a chamber which is closed off from the outside and is filled with a fluid medium,
wherein at least one compressible element for protecting against excess pressure is arranged in the chamber,
wherein the chamber is closed off from the outside by a membrane,
wherein the housing has a stop for limiting the deflection of the membrane, and
wherein the stop is located between the membrane and a part of the chamber in which the compressible element is located.
2. The pressure sensor according to claim 1 , wherein the compressible element is designed to lower a maximum pressure that prevails in the chamber when the membrane bears against the stop.
3. The pressure sensor according to claim 1 , wherein the total volume of the compressible elements arranged in the chamber is at least 50% of the volume of the fluid medium.
4. The pressure sensor according to claim 3 , wherein the sensor element has a sensor housing in which a pressure line for directing a pressure onto the pressure-sensitive region is formed.
5. The pressure sensor according to claim 4 , wherein the sensor housing has an inner wall which is lined with the compressible element.
6. The pressure sensor according to claim 4 or 5 , wherein the pressure line leads through the compressible element.
7. The pressure sensor according to claim 4 , wherein the pressure line extends vertically toward the pressure-sensitive region.
8. The pressure sensor according to claim 4 , wherein the pressure line extends at an inclination angle toward the pressure-sensitive region.
9. The pressure sensor according to claim 4 , wherein the pressure line has sections which have different diameters.
10. The pressure sensor according to claim 1 , wherein a sensor element having a pressure-sensitive region is arranged in the chamber.
11. The pressure sensor according to claim 10 , wherein the distance of the compressible element from the sensor element is less than or equal to 1000 μm.
12. The pressure sensor according to claim 11 , wherein the pressure-sensitive region is in the form of a membrane.
13. The pressure sensor according to claim 1 , further comprising:
two chambers which are closed off from the outside and are each filled with a fluid medium,
wherein at least one compressible element is arranged in each chamber, and
wherein the compressible elements are designed such that they decrease their volume when the medium freezes.