SUBSTRATE CONVEYANCE ROLLER, THIN FILM MANUFACTURING DEVICE AND THIN FILM MANUFACTURING METHOD
A substrate-conveying roller 6 A is configured to convey a substrate under vacuum, and includes a first shell 11 , an internal block 12 , and a shaft 10 . The first shell 11 has a cylindrical outer circumferential surface for supporting the substrate, and can rotate in synchronization with the substrate. The internal block 12 is disposed inside the first shell 11 , and is blocked from rotating in synchronization with the substrate. The shaft 10 extends through, and supports the internal block 12 . A clearance 15 is formed between the inner circumferential surface of the first shell 11 and the internal block 12 . A gas is introduced into the clearance 15 from the internal block 12 toward the inner circumferential surface of the first shell 11.
1 - 21 . (canceled)
22 . A substrate-conveying roller that conveys a substrate under vacuum, the substrate-conveying roller comprising:
a cylindrical first shell having a cylindrical outer circumferential surface for supporting the substrate, the cylindrical first shell being capable of rotating in synchronization with the substrate;
an internal block disposed inside the first shell and blocked from rotating in synchronization with the substrate; and
a shaft extending through, and supporting the internal block, wherein
a clearance is formed between an inner circumferential surface of the first shell and an outer circumferential surface of the internal block,
a gas is introduced into the clearance from the internal block toward the inner circumferential surface of the first shell,
the shaft or the internal block has a flow path in which a coolant liquid flows,
the internal block has a shape of a solid cylinder or a hollow cylinder, and
the clearance has a width of 0.05 to 1 mm, the width being defined by a distance between the inner circumferential surface of the first shell and the outer circumferential surface of the internal block.
23 . The substrate-conveying roller according to claim 22 , wherein a pressure in the clearance is higher than a pressure outside the first shell.
24 . The substrate-conveying roller according to claim 22 , wherein a position at which the gas is introduced into the clearance from the internal block toward the inner circumferential surface of the first shell is located in a central region in a width direction of the first shell.
25 . The substrate-conveying roller according to claim 22 , wherein
the gas is introduced into the clearance from the internal block toward the inner circumferential surface of the first shell through a plurality of holes disposed in the shaft or the internal block, and
the plurality of holes are formed along an axial direction of the shaft or the internal block.
26 . The substrate-conveying roller according to claim 22 , wherein the gas is introduced into the clearance from the internal block toward the inner circumferential surface of the first shell via a manifold provided in the internal block.
27 . The substrate-conveying roller according to claim 26 , wherein the manifold includes a plurality of manifolds arranged in a width direction of the internal block.
28 . The substrate-conveying roller according to claim 27 , wherein
the internal block has a plurality of separate blocks arranged in a width direction of the substrate and corresponding to the plurality of manifolds, and
the first shell has a plurality of first separate shells corresponding to the separate blocks.
29 . The substrate-conveying roller according to claim 28 , further comprising a mechanism connecting each of the first separate shells to the internal block or the shaft via a bearing.
30 . The substrate-conveying roller according to claim 22 , further comprising:
a second shell disposed between the first shell and the internal block so as to be spaced from the first shell by a gap, and having a plurality of communicating holes for introducing the gas from the internal block to the inner circumferential surface of the first shell;
a first connection mechanism connecting the second shell to the shaft via a bearing or connecting the second shell to the internal block via a bearing; and
a second connection mechanism connecting the first shell to the second shell via a bearing.
31 . The substrate-conveying roller according to claim 29 , wherein
the internal block has a plurality of separate blocks arranged in a width direction of the substrate and provided separately so as to correspond to the plurality of manifolds, and
the second shell has a plurality of second separate shells corresponding to the separate blocks.
32 . The substrate-conveying roller according to claim 22 , wherein the gas is discharged only from an end portion of the first shell.
33 . The substrate-conveying roller according to claim 22 , wherein the first shell has no through hole in a circumference thereof.
34 . The substrate-conveying roller according to claim 22 , wherein a pressure in the clearance is 10 to 1000 Pa.
35 . The substrate-conveying roller according to claim 22 , further comprising a leakage preventing structure for reducing gas leakage, the leakage preventing structure being disposed at a position closer to either end in a width direction of the first shell than a position at which the gas is introduced into the clearance from the internal block toward the inner circumferential surface of the first shell.
36 . The substrate-conveying roller according to claim 22 , wherein
the first shell is connected to the shaft or the internal block via a bearing,
the bearing is disposed at an end portion of the first shell, and
the gas is discharged outside the first shell only through the bearing.
37 . The substrate-conveying roller according to claim 22 , wherein an average pressure in the clearance is lower than an atmospheric pressure when the gas has been introduced into the substrate-conveying roller placed under vacuum.
38 . An apparatus for producing thin films, comprising:
a roller conveyance system including the substrate-conveying roller according to claim 22 ;
an opening provided in a conveyance route of the roller conveyance system;
a film formation source for applying a material to the substrate at the opening; and
a vacuum chamber housing the roller conveyance system and the film formation source.
39 . A method for producing thin films, comprising steps of:
conveying a substrate from an unwinding position to a winding position in a roller conveyance system under vacuum; and
evaporating a material from a film formation source toward an opening provided in a conveyance route of the roller conveyance system, so as to apply the material to the substrate,
wherein the roller conveyance system includes the substrate-conveying roller according to claim 22 .
40 . The substrate-conveying roller according to claim 30 , wherein the gas is discharged outside the first shell and the second shell only though the bearings of the first connection mechanism and the second connection mechanism.