Method for singulating a component composite assembly
A method relates to separating a component composite into a plurality of component regions, wherein the component composite is provided having a semiconductor layer sequence comprising a region for generating or for receiving electromagnetic radiation. The component composite is mounted on a rigid subcarrier. The component composite is separated into the plurality of component regions, wherein one semiconductor body is produced from the semiconductor layer sequence for each component region. The component regions are removed from the subcarrier.
1. A method for singulating a component composite assembly into a plurality of component regions comprising the following steps:
a) providing a component composite assembly having a semiconductor layer sequence, which has an active region provided for generating or for receiving electromagnetic radiation;
b) fixing the component composite assembly to a rigid auxiliary carrier;
c) singulating the component composite assembly into the plurality of component regions, wherein for each component region a respective semiconductor body emerges from the semiconductor layer sequence; and
d) removing the component regions from the rigid auxiliary carrier;
wherein, before step d), side faces of the component regions are formed by means of a plasma method.
2. The method according to claim 1 , wherein the component composite assembly is fixed on the rigid auxiliary carrier by means of a metallic connection.
3. The method according to claim 2 , wherein the component regions are removed from the rigid auxiliary carrier by means of a laser detachment method.
4. The method according to claim 2 , wherein, before step d), side faces of the component regions are formed by means of a plasma method.
5. The method according to claim 2 , wherein the component composite assembly is singulated by means of a laser separating method.
6. The method according to claim 1 , wherein the component regions are removed from the rigid auxiliary carrier by means of a laser detachment method.
7. The method according to claim 6 , wherein, before step d), side faces of the component regions are formed by means of a plasma method.
8. The method according to claim 1 , wherein the component composite assembly is severed by means of the plasma method during singulation in step c).
9. The method according to claim 1 , wherein the side faces of the component regions are formed by means of the plasma method after the component composite assembly has been singulated in step c).
10. The method according to claim 1 , wherein the component composite assembly is singulated by means of a laser separating method.
11. The method according to claim 1 , wherein the component regions are removed selectively from the rigid auxiliary carrier in step d).
12. The method according to claim 1 , wherein a further auxiliary carrier is applied to the component regions before step d).
13. The method according to claim 12 , wherein the further auxiliary carrier is a film.
14. The method according to claim 1 , wherein before step b), a sacrificial layer is applied to the rigid auxiliary carrier.
15. The method according to claim 14 , wherein the sacrificial layer is at least partly decomposed in step d).
16. The method according to claim 1 , wherein the rigid auxiliary carrier contains sapphire.
17. The method according to claim 1 , wherein
the component composite assembly is fixed on the rigid auxiliary carrier by means of a metallic connection;
before step d), side faces of the component regions are formed by means of a plasma method; and
the component regions are removed from the rigid auxiliary carrier by means of a laser detachment method.
18. A method for singulating a component composite assembly into a plurality of component regions comprising the following steps:
a) providing a component composite assembly having a semiconductor layer sequence on a carrier, which has an active region provided for generating or for receiving electromagnetic radiation;
b) fixing the component composite assembly including the carrier to a rigid auxiliary carrier;
c) singulating the component composite assembly into the plurality of component regions, wherein for each component region a respective semiconductor body emerges from the semiconductor layer sequence; and
d) removing the component regions from the rigid auxiliary carrier;
wherein the semiconductor layer sequence is arranged on the side facing away from the rigid auxiliary carrier and wherein in step c) the carrier is severed.
19. A method for singulating a component composite assembly into a plurality of component regions comprising the following steps:
a) providing a component composite assembly having a semiconductor layer sequence, which has an active region provided for generating or for receiving electromagnetic radiation;
b) fixing the component composite assembly to a rigid auxiliary carrier by means of a metallic connection;
c) singulating the component composite assembly into the plurality of component regions, wherein for each component region a respective semiconductor body emerges from the semiconductor layer sequence; and
d) removing the component regions from the rigid auxiliary carrier.