Method of producing at least one optoelectronic semiconductor chip
View Patent ↗A method of producing at least one optoelectronic semiconductor chip includes providing at least one optoelectronic structure, including a growth support and a semiconductor layer sequence with an active region, the semiconductor layer sequence being deposited epitaxially on the growth support, providing a carrier, applying the at least one optoelectronic structure onto the carrier with its side remote from the growth support, coating the at least one optoelectronic structure with a protective material, the protective material covering the outer face, remote from the carrier, of the growth support and side faces of the growth support and of the semiconductor layer sequence, and detaching the growth support from the semiconductor layer sequence of the at least one optoelectronic structure.
1. A method of producing at least one optoelectronic semiconductor chip comprising:
providing at least one optoelectronic structure, comprising a growth support and a semiconductor layer sequence with an active region, the semiconductor layer sequence being deposited epitaxially on the growth support,
providing a carrier,
applying the at least one optoelectronic structure onto the carrier with its side remote from the growth support,
coating the at least one optoelectronic structure with a conformal layer of a protective material, the conformal layer of the protective material covering an outer face, remote from the carrier, of the growth support and side faces of the growth support and of the semiconductor layer sequence, and
detaching the growth support from the semiconductor layer sequence of the at least one optoelectronic structure.
2. The method according to claim 1 , wherein
the protective material comprises a Parylene,
after coating the at least one optoelectronic structure, the protective material completely covers the outer face, not covered by the carrier, of the at least one optoelectronic structure and, at least in places, covers the top face of the carrier facing the at least one optoelectronic structure, and
the outer face of the protective material remote from the at least one optoelectronic structure is coated with a reflective material at least in places prior to detachment of the growth support.
3. The method according to claim 1 , wherein, after coating the at least one optoelectronic structure, the protective material completely covers the outer face, not covered by the carrier, of the at least one optoelectronic structure and, at least in places, covers the top face of the carrier facing the at least one optoelectronic structure.
4. The method according to claim 1 , wherein remaining protective material is removed after detachment of the growth support from the semiconductor layer sequence of the at least one optoelectronic structure.
5. The method according to claim 1 , wherein the outer face of the protective material remote from the at least one optoelectronic structure is coated with a reflective material at least in places prior to detachment of the growth support.
6. The method according to claim 5 , wherein the reflective material completely covers the exposed outer face of the protective material.
7. The method according to claim 1 , wherein the growth support is detached with an etchant and the protective material is not susceptible to attack by the etchant.
8. The method according to claim 1 , wherein the protective material consists of a radiation-transmissive plastics material.
9. The method according to claim 1 , wherein the protective material comprises a Parylene.
10. The method according to claim 1 , wherein the growth support comprises silicon and the semiconductor layer sequence is based on a nitride compound semiconductor material.
11. The method according to claim 1 , wherein the at least one optoelectronic structure comprises n-side and p-side contact points on its side facing the carrier, wherein the contact points electrically conductively connect to the carrier on application of the at least one optoelectronic structure onto the carrier.