Graphene windows, methods for making same, and devices containing same
View Patent ↗The present invention relates to graphene windows and methods for making same. One method comprises selecting a high purity metal foil, growing a layer of graphene on a first face of the metal foil, patterning the second face of the graphene-modified foil with a polymer, wherein the second face of the graphene-modified foil has an exposed region and etching the second face of the graphene-modified foil in the exposed region until exposing the first layer of graphene.
1. A method comprising:
a. selecting a metal foil having a first face and a second face, wherein the metal foil comprises at least 99.8% by weight of metal;
b. growing a first layer of graphene on the first face of the metal foil to form a graphene-modified foil, wherein the second face of the graphene-modified foil is selected from the group consisting of
i. a second layer of graphene on the second face of the metal foil, wherein the second layer of graphene was grown during the step of growing the first layer of graphene, and
ii. the second face of the metal foil;
c. patterning the second face of the graphene-modified foil with a polymer, wherein
the second face of the graphene-modified foil has an exposed region;
d. etching the second face of the graphene-modified foil in the exposed region until exposing the first layer of graphene, wherein a graphene window is formed.
2. The method of claim 1 , wherein the metal of the metal foil is Cu.
3. The method of claim 1 , wherein the graphene is grown by CVD.
4. The method of claim 1 further comprising:
a. before the step of growing the first layer of graphene, applying a protective coating on the second face of the metal foil, wherein the protective coating prevents graphene from growing on the second face of the metal foil during the step of growing the first layer of graphene;
b. removing the protective coating from the second face of the metal foil such that the second face of the graphene-modified foil is the second face of the metal foil.
5. The method of claim 1 further comprising:
a. growing the second layer of graphene on the second face of the metal foil during the step of growing the first layer of graphene; and
b. removing the second layer of graphene on the second face before the step of patterning, such that the second face of the graphene-modified foil is the second face of the metal foil.
6. The method of claim 1 , wherein the metal foil comprises at least 99.99% by weight of the metal.
7. The method of claim 1 , wherein the metal foil is thermally annealed before growing the first layer of graphene.
8. The method of claim 7 , wherein the step of thermally annealing increases average grain size in the metal foil.
9. The method of claim 1 further comprising depositing a material on the graphene on the first face of the graphene-modified foil before the step of patterning the second face of the graphene-modified foil with a polymer.
10. The method of claim 9 , wherein the graphene window formed has a feature atop.
11. The method of claim 1 , wherein the metal foil has native or doped impurities.
12. The method of claim 11 , wherein, during the step of thermal annealing, the impurities move toward grain boundaries of the metal foil.
13. The method of claim 11 , wherein the graphene window formed has adhered, concentrated impurities.
14. A method comprising:
a. selecting a metal foil having a first face and a second face;
b. thermally annealing the metal foil;
c. after the step of annealing the metal foil, growing a first layer of graphene on the first face of the metal foil to form a graphene-modified foil, wherein the second face of the graphene-modified foil is selected from the group consisting of
i. a second layer of graphene on the second face of the metal foil, wherein the second layer of graphene was grown during the step of growing the first layer of graphene, and
ii. the second face of the metal foil;
d. patterning the second face of the graphene-modified foil with a polymer, wherein the second face of the graphene-modified foil has an exposed region;
e. etching the second face of the graphene-modified foil in the exposed region until exposing the first layer of graphene, wherein a graphene window is formed.
15. The method of claim 14 , wherein the metal of the metal foil is Cu.
16. The method of claim 14 , wherein the graphene is grown by CVD.
17. The method of claim 14 further comprising:
a. growing the second layer of graphene on the second face of the metal foil during the step of growing the first layer of graphene; and
b. removing the second layer of graphene on the second face before the step of patterning, such that the second face of the graphene-modified foil is the second face of the metal foil.