Magnetoresistive effect element and method of manufacturing magnetoresistive effect element
View Patent ↗A magnetoresistive effect element includes first and second conductive layers, a first magnetic layer between the first and second conductive layers having a magnetization direction that is unchangeable, a second magnetic layer between the first and second conductive layers having a magnetization direction that is changeable, a tunnel barrier layer between the first and second magnetic layers, a nonmagnetic layer between the second magnetic layer and the second conductive layer, and a conductive sidewall film that provides a current path between the second magnetic layer and the second conductive layer that has a lower resistance than a current path through the nonmagnetic layer.
1. A magnetoresistive effect element comprising:
first and second conductive layers;
a first magnetic layer between the first and second conductive layers having a magnetization direction that is unchangeable;
a second magnetic layer between the first and second conductive layers having a magnetization direction that is changeable;
a tunnel barrier layer between the first and second magnetic layers;
a nonmagnetic layer between the second magnetic layer and the second conductive layer; and
a conductive sidewall film that provides a current path between the second magnetic layer and the second conductive layer, the conductive sidewall film having a lower resistance than a current path through the nonmagnetic layer, wherein the tunnel barrier layer is laminated on the first magnetic layer and the conductive sidewall film extends from an upper surface of the tunnel barrier layer to a side of the second conductive layer.
2. The magnetoresistive effect element of claim 1 , further comprising an insulating sidewall film formed on sides of the conductive sidewall film and the second conductive layer.
3. The magnetoresistive effect element of claim 2 , wherein each of the layers have substantially circular planar surfaces and a diameter of the first magnetic layer is equal to a diameter of the tunnel barrier layer and larger than a diameter of the second magnetic layer.
4. The magnetoresistive effect element of claim 1 , wherein the tunnel barrier layer and the nonmagnetic layer each include magnesium oxide as a main component, and the conductive sidewall film and the second magnetic layer each include a composition containing a first element.
5. A magnetoresistive effect element comprising:
first and second conductive layers;
a first magnetic layer between the first and second conductive layers having a magnetization direction that is unchangeable;
a second magnetic layer between the first and second conductive layers having a magnetization direction that is changeable;
a tunnel barrier layer between the first and second magnetic layers;
a nonmagnetic layer between the second magnetic layer and the second conductive layer; and
a conductive sidewall film that provides a current path between the second magnetic layer and the second conductive layer, the conductive sidewall film having a lower resistance than a current path through the nonmagnetic layer, wherein the first magnetic layer is laminated on the tunnel barrier layer and the conductive sidewall film extends from an upper surface of the tunnel barrier layer to a side of the second conductive layer.
6. The magnetoresistive effect element of claim 5 , further comprising an insulating sidewall film formed on sides of the first magnetic layer and the first conductive layer.
7. The magnetoresistive effect element of claim 6 , wherein each of the layers have substantially circular planar surfaces and a diameter of the second magnetic layer is equal to a diameter of the tunnel barrier layer and larger than a diameter of the first magnetic layer.
8. A magnetoresistive effect element comprising:
first and second conductive layers;
a first magnetic layer between the first and second conductive layers having a magnetization direction that is unchangeable;
a second magnetic layer between the first and second conductive layers having a magnetization direction that is changeable;
a tunnel barrier layer between the first and second magnetic layers;
a nonmagnetic layer between the second magnetic layer and the second conductive layer;
a conductive sidewall film that provides a current path between the second magnetic layer and the second conductive layer, the conductive sidewall film having a lower resistance than a current path through the nonmagnetic layer; and
a third magnetic layer laminated on the nonmagnetic layer and an another nonmagnetic layer laminated on the third magnetic layer,
wherein the conductive sidewall film extends from an upper surface of the tunnel barrier layer to a side of the second conductive layer.