Memory element and memory device
View Patent ↗A memory element and a memory device, the memory element including a first electrode, a memory layer, and a second electrode in this order. The memory layer includes a resistance change layer provided on the first electrode side, and an ion source layer provided on the second electrode side and is higher in resistance value than the resistance change layer. A resistance value of the resistance change layer is changeable in response to a composition change by applied voltage to the first and second electrodes.
1. A memory element, comprising a first electrode, a memory layer, and a second electrode in this order, wherein the memory layer includes:
a resistance change layer provided on the first electrode side thereof; and an ion source layer provided on the second electrode side thereof,
wherein,
a resistance value of the resistance change layer is configured to change in response to a composition change by means of a voltage applied to the first and second electrodes,
a resistance value of the ion source layer is higher than the resistance value of the resistance change layer, and
the ion source layer comprises (a) at least one of metallic elements of copper (Cu), aluminum (Al), germanium (Ge), and zinc (Zn), (b) at least one of zirconium (Zr), titanium (Ti), and tungsten (W), and (c) at least one of oxygen (O), tellurium (Te), sulfur (S), and selenium (Se).
2. The memory element according to claim 1 , wherein the memory layer includes an oxide layer between the resistance change layer and the first electrode.
3. The memory element according to claim 1 , wherein the resistance change layer contains tellurium (Te).
4. The memory element according to claim 1 , wherein the change of resistance value occurs by formation of, in the resistance change layer, a low-resistance section containing a metallic element by the applied voltage to the first and second electrodes.
5. A memory device, comprising:
a plurality of memory elements each including a first electrode, a memory layer, and a second electrode in this order; and
pulse application unit applying a voltage or current pulse selectively to the memory elements,
wherein, for each memory element, (1) the memory layer includes (a) a resistance change layer provided on the first electrode side thereof, and (b) an ion source layer provided on the second electrode side thereof and comprising: (i) at least one of metallic elements of copper (Cu), aluminum (Al), germanium (Ge), and zinc (Zn), (ii) at least one of zirconium (Zr), titanium (Ti), and tungsten (W), and (iii) at least one of oxygen (O), tellurium (Te), sulfur (S), and selenium (Se), (2) a resistance value of the resistance change layer is configured to change in response to a composition change by a voltage applied to the first and second electrodes, and (3) a resistance value of the ion source layer is higher than the resistance value of the resistance change layer.
6. The memory device according to claim 5 , wherein the memory layer includes an oxide layer between the resistance change layer and the first electrode.
7. The memory device according to claim 5 , wherein the resistance change layer contains tellurium (Te).
8. The memory device according to claim 5 , wherein the change of resistance value occurs by formation of, in the resistance change layer, a low-resistance section containing a metallic element by the applied voltage to the first and second electrodes.