Piezoelectric film and method of manufacturing the piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
View Patent ↗In order to provide a non-lead piezoelectric film having high crystalline orientation, low dielectric loss, high polarization-disappear temperature, and high piezoelectric constant, the present invention is a piezoelectric film comprising: a Na x M 1-x layer 13 having a (001) orientation only; and a (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer 15 having a (001) orientation only. The (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer 15 is formed on the Na x M 1-x layer 13 . M represents Pt, Ir, or PtIr. Q represents Fe, Co, Zn 0.5 Ti 0.5 , or Mg 0.5 Ti 0.5 . x represents a value of not less than 0.002 and not more than 0.02. α represents a value of not less than 0.20 and not more than 0.50.
1. A piezoelectric film comprising:
a Na x M 1-x layer having a (001) orientation only; and
a (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer having a (001) orientation only; wherein
the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer is formed on the Na x M 1-x layer;
M represents Pt, Ir, or PtIr;
Q represents Fe, Co, Zn 0.5 Ti 0.5 , or Mg 0.5 Ti 0.5 ;
x represents a value of not less than 0.002 and not more than 0.02; and
α represents a value of not less than 0.20 and not more than 0.50.
2. The piezoelectric film according to claim 1 , wherein
the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer is in contact with the Na x M 1-x layer.
3. The piezoelectric film according to claim 1 , wherein
the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer further contains Mn.