IP Library Granted Patent US 9,196,781
Granted Patent B2
US 9,196,781 · App. 14/047,315 · Granted Nov 24, 2015

Materials, systems and methods for optoelectronic devices

Inventors: Hui Tian (Cupertino, CA); Edward Sargent (Toronto, CA)
Assignee: InVisage Technologies, Inc.
H01L31/1013H01L27/14603H01L27/14609H01L27/14641H01L27/14647H01L31/036H01L27/14601H01L27/14652H01L27/14687H01L27/14692
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Quick Facts
Patent No.
US 9,196,781
App. No.
14/047,315
Granted
Nov 24, 2015
Kind
B2
Abstract

A photodetector is described along with corresponding materials, systems, and methods. The photodetector comprises an integrated circuit and at least two optically sensitive layers. A first optically sensitive layer is over at least a portion of the integrated circuit, and a second optically sensitive layer is over the first optically sensitive layer. Each optically sensitive layer is interposed between two electrodes. The two electrodes include a respective first electrode and a respective second electrode. The integrated circuit selectively applies a bias to the electrodes and reads signals from the optically sensitive layers. The signal is related to the number of photons received by the respective optically sensitive layer.

Claims (40)

1. A light-detecting pixel, comprising:

a substrate;

a first electrode;

an active layer comprising a photoconductive material;

a second electrode; and

an overlying layer including at least one material chosen from a list of materials consisting of a passivation layer, an encapsulation layer, a transparent dielectric, an optical filter, an additional active layer, and a contact, at least one of the first electrode and the second electrode being configured to form a rectifying junction with the active layer, and wherein an electrical bias is to be applied between the first electrode and the second electrode.

2. The light-detecting pixel of claim 1 , wherein the substrate is a silicon CMOS integrated circuit.

3. The light-detecting pixel of claim 1 , wherein the second electrode is an electron-withdrawing contact.

4. The light-detecting pixel of claim 1 , wherein the second electrode is a hole-withdrawing contact.

5. The light-detecting pixel of claim 1 , wherein an electrical bias is to be applied between the first electrode and the second electrode.

6. The light-detecting pixel of claim 1 , wherein the active layer of photoconductive material comprises mutually-touching semiconductor nanoparticles, wherein non-touching surfaces of the connected particles may be coated by one or more of a list of coatings consisting of an inorganic material, including at least one of an oxide and sulfate, and an organic material including an organic ligand.

7. The light-detecting pixel of claim 6 , wherein the mutually-touching semiconductor nanoparticles are chosen from the list consisting of PbS, PbSe, or PbTe; CdS, CdSe, or CdTe; Si, Ge, or C; In 2 Se 3 , In 2 S 3 , including either the alpha-phase or the beta-phase; InP; and Bi 2 S 3 .

8. The light-detecting pixel of claim 6 , wherein the organic ligand material coating the non-touching surfaces of the connected nanoparticles is chosen from a list of coatings consisting of Thiols including ethanethiol, ethanedithiol, benzenethiol, benzenedithiol; Amines including pyridine, butylamine, and octylamine; Hydrazine; and Carboxylates including oleic acid.

9. The light-detecting pixel of claim 1 , wherein at least one of the electrodes is a metal.

10. The light-detecting pixel of claim 1 , wherein at least one of the electrodes is a degenerately-doped semiconductor, or a combination of such materials.

11. The light-detecting pixel of claim 1 , wherein at least one material of at least one of the electrodes is chosen from a list of materials consisting of Au, Pt, Pd, Cu, Ni, NiS, TiN, TaN, p-type polysilicon, and p-type amorphous silicon.

12. The light-detecting pixel of claim 1 , wherein at least one material of at least one of the electrodes is chosen from a list of materials consisting of Al, Ag, In, Mg, Ca, Li, Cu, Ni, NiS, TiN, TaN, n-type polysilicon, and n-type amorphous silicon.

13. The light-detecting pixel of claim 1 , wherein at least one material of at least one of the electrodes is chosen from a list of materials consisting of combinations of a metal, a degenerately-doped semiconductor, and a combination of such materials; and a semiconductor, and an insulating material having a bandgap.

14. The light-detecting pixel of claim 13 , wherein the semiconductor or insulator is in direct physical contact with the active layer.

15. The light-detecting pixel of claim 14 , wherein the semiconductor or insulator is an amorphous material.

16. The light-detecting pixel of claim 14 , wherein the semiconductor or insulator has a thickness in the range of about 2 nm to about 20 nm.

17. The light-detecting pixel of claim 1 , wherein at least one of the biased junctions is to produce a region within the active layer that is substantially depleted of free charges.

18. The light-detecting pixel of claim 1 , wherein at least one of the biased junctions is to produce an active layer that is substantially depleted of free charges throughout its thickness.

19. The light-detecting pixel of claim 1 , wherein a frequency of response of the light-detecting pixel to modulation of an incoming light signal exceeds about one thousand cycles per second.

20. The light-detecting pixel of claim 1 , wherein a frequency of response of the light-detecting pixel to modulation of an incoming light signal exceeds about one million cycles per second.

21. The light-detecting pixel of claim 1 , wherein a dark current density of the light-detecting pixel is less than about 0.1 nA/cm 2 .

22. The light-detecting pixel of claim 1 , wherein a dark current density of the light-detecting pixel is less than about 10 pA/cm 2 .

23. The light-detecting pixel of claim 1 , wherein a dark current density of the light-detecting pixel is less than about 1 pA/cm 2 .

24. The light-detecting pixel of claim 1 , wherein a dark current density of the light-detecting pixel is less than about 0.1 pA/cm 2 .

25. The light-detecting pixel of claim 1 , wherein, following a turn-off of incident illumination, the device returns to a dark current value within about 10 milliseconds.

26. The light-detecting pixel of claim 1 , wherein, following a turn-off of incident illumination, the device returns to a dark current value within about 1 millisecond.

27. The light-detecting pixel of claim 1 , wherein, following a turn-off of incident illumination, the device returns to a dark current value within about 0.1 milliseconds.

28. The light-detecting pixel of claim 1 , wherein, following a turn-off of incident illumination, the device returns to a dark current value within about 10 microseconds.

29. The light-detecting pixel of claim 1 , wherein, following a turn-off of incident illumination, the device returns to a dark current value within about 1 microsecond.

30. The light-detecting pixel of claim 1 , wherein the first electrode possesses a deep work function electrode.

31. The light-detecting pixel of claim 1 , wherein the first electrode has a work function deeper than about −4.5 eV.

32. The light-detecting pixel of claim 1 , wherein the first electrode comprises at least one deep work function material selected from a list of materials including Au, Pt, Pd, Ni, Cu, Au-rich ITO, Pt-rich ITO, Pd-rich ITO, and a deep-work-function ITO.

33. The light-detecting pixel of claim 1 , wherein the second electrode possesses a shallow work function.

34. The light-detecting pixel of claim 1 , wherein the second electrode possesses a work function shallower than about −4.5 eV.

35. The light-detecting pixel of claim 1 , wherein the second electrode comprises at least one shallow work function material selected from a list of materials including Al, Mg, Ca, and shallow-work-function ITO.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded Mar 16, 2017
From: HORIZON TECHNOLOGY FINANCE CORPORATION
To: INVISAGE TECHNOLOGIES, INC.
Reel/Frame 042024/0887 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 20, 2015
From: TIAN, HUI; SARGENT, EDWARD
To: INVISAGE TECHNOLOGIES, INC.
Reel/Frame 036833/0887 →
SECURITY INTEREST Recorded Jul 21, 2015
From: INVISAGE TECHNOLOGIES, INC.
To: HORIZON TECHNOLOGY FINANCE CORPORATION
Reel/Frame 036148/0467 →
Continuity (12)
Continuation 13218761 · Aug 26, 2011
Continuation 13209264 · Aug 12, 2011
Continuation 12728181 · Mar 19, 2010
Continuation 12106256 · Apr 18, 2008
Provisional Application 60912581 · Apr 18, 2007
Provisional Application 60958846 · Jul 9, 2007
Provisional Application 60970211 · Sep 5, 2007
Provisional Application 61026440 · Feb 5, 2008
Provisional Application 61026650 · Feb 6, 2008
Provisional Application 61028481 · Feb 13, 2008
Provisional Application 61046379 · Apr 18, 2008
Related Publication 20140175591A1 · Jun 26, 2014