Metal oxide thin film substrate for OLED and method of fabricating the same
View Patent ↗A metal oxide thin film substrate for an organic light-emitting device (OLED) which exhibits superior light extraction efficiency and can be easily fabricated at low cost and a method of fabricating the same and a method of fabricating the same. The metal oxide thin film substrate for an OLED includes a base substrate and a metal oxide thin film formed on the base substrate, the metal oxide thin film being made of a mixture of at least two metal oxides having different refractive indices.
1. A method of fabricating a metal oxide thin film substrate of an organic light emitting device, comprising:
converting at least two metal oxides having different refractive indices into respective sol-gel solutions;
mixing the sol-gel solutions to form a mixture;
coating a base substrate with the mixture;
drying the mixture that coats the base substrate of the organic light emitting device; and
firing the dried mixture into a metal oxide thin film,
wherein mixing the sol-gel solutions comprises mixing the sol-gel solutions at a composition ratio between the metal oxides that is positioned within a miscibility gap depending on temperature in a phase diagram.
2. The method of claim 1 , wherein the metal oxides are selected from the group consisting of TiO 2 , SnO 2 , Al 2 O 3 , MgO, ZrO 2 and ZnO.
3. The method of claim 1 , wherein mixing the sol-gel solutions comprises mixing the sol-gel solutions such that a volume ratio of each of the metal oxides to the total metal oxides is 1% or more.
4. The method of claim 1 , wherein coating the base substrate with the mixture comprises depositing the mixture on the base substrate by spin coating.