Methods and apparatus for identifying and reducing semiconductor failures
The present disclosure provides multi-junction solar cell structures and fabrication methods thereof that improve electrical testing capability and reduce chip failure rates. In the present invention a special masking pattern is used in the layout such that all or some of the epitaxial layers are etched away in the corner areas of each solar cell. Consequently, the semiconductor substrate or one or more of the interconnections between junctions become accessible from the top (the side facing the sun) to make electrical connections.
1. A method for making a multi-junction solar cell comprising:
providing a multi-junction solar cell comprising:
a substrate comprising a top surface and a bottom surface; and
two or more junctions overlying the top surface of the substrate, wherein each of the two or more junctions is configured to absorb a different portion of the solar spectrum and each of the two or more junctions comprises an uppermost n-type region;
patterning the multi-junction solar cell in a mesa isolation pattern to provide exposed areas;
etching away the multi-junction solar cell in the exposed areas according to the mesa isolation pattern to provide a mesa structure;
patterning the multi-junction solar cell in a corner exposure pattern to define one or more exposed corners regions of the mesa structure;
etching away part or all of the multi-junction solar cell according to the corner exposure pattern to provide a clipped mesa structure comprising one or more exposed corner regions, wherein the one or more exposed corner regions comprises an exposed substrate region, an exposed uppermost n-type region, or both an exposed substrate region and an exposed uppermost n-type region; and
providing one or more metal contacts on the exposed substrate region, the exposed uppermost n-type region, or both the exposed substrate region and the exposed uppermost n-type region, wherein each of the one more metal contacts is characterized by dimensions less than dimensions of the clipped mesa structure.
2. The method of claim 1 , wherein the one or more exposed corner regions comprises an exposed substrate region.
3. The method of claim 1 , comprising:
providing a clipped busbar and a grid pattern overlying the two or more junctions; and
providing a back metal contact on the bottom surface of the substrate.
4. The method of claim 3 , wherein each of the one or more exposed corner regions is characterized by dimensions z and z′, wherein dimensions z and z′ are less than a width of the clipped busbar.
5. The method of claim 1 , wherein each of the one or more exposed corner regions is characterized by dimension z and z′, wherein dimensions z and z′ are greater than 25 micrometers.
6. The method of claim 1 , wherein each of the one or more exposed corner regions is characterized by the dimension z and z′, wherein dimensions z and z′ are between 250 micrometers and 600 micrometers.
7. The method of claim 1 , wherein etching away part or all of the multi-junction solar cell according to the corner exposure pattern comprises exposing one or more uppermost n-type regions.
8. The method of claims 1 , wherein providing one or more metal contacts comprises providing more than one metal contact within the one or more of the exposed corner regions.
9. The method of claim 1 , wherein providing one or more metal contacts comprises providing a single metal contact within adjacent exposed corner regions of adjacent clipped mesa structures.
10. A multi-junction solar cell comprising:
a substrate comprising a top surface and a bottom surface;
two or more junctions overlying the top surface of the substrate, wherein each of the two or more junctions is configured to absorb a different portion of the solar spectrum and each of the two or more junctions comprises an uppermost n-type region;
a clipped busbar overlying the two or more junctions, wherein the clipped busbar comprises a clipped mesa area;
a clipped mesa structure comprising one or more exposed corner regions, within the clipped mesa area, wherein,
the one or more exposed corner regions comprises an exposed substrate region, an exposed uppermost n-type region or a combination thereof; and
one or more metal contacts disposed on the exposed substrate region, the exposed uppermost n-type region, or both the substrate region and the exposed uppermost n-type region.
11. The multi-junction solar cell of claim 10 , wherein the multi-junction solar cell further comprises:
one or more clipped busbars overlying the two or more junctions;
a grid pattern interconnected to the one or more clipped busbars; and
a back metal contact underlying the bottom surface of the substrate.
12. The multi-junction solar cell of claim 10 , wherein the one or more exposed corner regions comprises an exposed uppermost n-type region.
13. The multi-junction solar cell of claim 10 , wherein the one or more exposed corner regions comprises an exposed substrate region.
14. The multi-junction solar cell of claim 10 , wherein each of the one or more exposed corner regions comprises a metal contact.
15. The multi-junction solar cell of claim 10 , comprising one or more clipped busbars overlying the two or more junctions; and
wherein the clipped mesa structure is characterized by dimensions z and z′, and
wherein dimensions z and z′, are less than dimensions of the one or more clipped busbars.
16. The multi-junction solar cell of claim 15 , wherein the dimensions z and z′ are greater than 25 micrometers.
17. The multi-junction solar cell of claim 15 , wherein the dimensions z and z′ are between 250 micrometers and 600 micrometers.