Granted Patent B1

US 9,343,098 · App. 14/054,762 · Granted May 17, 2016

Abstract

Claims (100)

1. A method for providing heat assisted magnetic recording (HAMR) transducer having air-bearing surface (ABS) corresponding to an ABS location and being optically coupled with a laser, the method comprising:

providing a waveguide for directing light from the laser toward the ABS

providing a write pole having a pole tip with an ABS location facing surface, the pole tip being in a down track direction from the waveguide;

providing at least one shield including a shield pedestal, the shield pedestal being in the down track direction from the pole tip such that the write pole is between the at least a portion of the at least one shield and the waveguide, the shield pedestal including an ABS-facing surface, the ABS-facing surface of the shield pedestal being a closest portion of the shield to the ABS location, the shield pedestal being magnetic; and

providing at least one protective pad adjacent to the write pole and residing between the ABS location and the shield pedestal, the step of providing the at least one protective pad further including

providing a first dielectric layer, a portion of the first dielectric layer residing on the pole tip;

providing a plurality of trenches in the dielectric layer, the plurality of trenches including at least a first protective pad trench in the dielectric layer, the at least the first protective pad trench having a location corresponding to the at least one protective pad;

providing at least a first protective pad material in the at least the first protective pad trench;

depositing an insulating layer;

providing a second dielectric layer on the insulating layer;

providing at least a second protective pad trench in the second dielectric layer; and

providing at least a second protective pad material in the second protective pad trench.

2. The method of claim 1 wherein the plurality of trenches include a plurality of coil trenches, wherein a sacrificial portion of the at least the first protective pad material resides in the plurality of coil trenches after the step of providing the first protective pad material, and wherein the method further includes:

removing the sacrificial portion of the at least one first protective pad material before the step of providing the second dielectric layer; and

plating at least one coil in the plurality of coil trenches before the step of providing the second dielectric layer.

3. The method of claim 1 wherein the at least the first protective pad material and the at least the second protective pad material each includes NiFe.

4. The method of claim 1 wherein the at least one protective pad includes at least one of NiFe, tantalum oxide, CoNiFe, Ta and aluminum nitride.

5. The method of claim 1 wherein the at least one protective pad occupies a portion of the ABS.

6. The method of claim 1 wherein the step of providing the at least one protective pad further includes:

depositing an insulator after the step of providing the plurality of trenches and before the step of providing the first protective pad material.

7. The method of claim 6 wherein the step of providing the shield further includes:

providing a shield pedestal trench in the first dielectric layer, the at least the first protective pad trench residing between the shield pedestal trench and the ABS location;

providing at least one shield material in the shield pedestal trench to form the shield pedestal.

8. The method of claim 7 wherein the step of providing the at least one shield material further includes:

plating the at least one shield material; and

performing a planarization.

9. The method of claim 8 wherein the step of providing the shield further includes:

removing at least a portion of the second dielectric layer to form a second shield trench, the second protective pad trench residing between the ABS location and the second shield trench; and

providing at least an additional shield material residing in the second shield trench contacting the at least one shield material in the first shield trench.

10. A method for providing heat assisted magnetic recording (HAMR) transducer having air-bearing surface (ABS) corresponding to an ABS location and being optically coupled with a laser, the method comprising:

providing a waveguide for directing light from the laser toward the ABS

providing a write pole having a pole tip with an ABS location facing surface, the pole tip being in a down track direction from the waveguide;

providing at least one shield including a shield pedestal, the shield pedestal being in the down track direction from the pole tip; and

providing at least one protective pad adjacent to the write pole and residing between the ABS location and the shield pedestal, wherein the step of providing the at least one protective pad further includes

providing a first dielectric layer, a portion of the first dielectric layer residing on the pole tip;

providing a plurality of trenches in the dielectric layer, the plurality of trenches including at least a first protective pad trench in the dielectric layer, the at least the first protective pad trench having a location corresponding to the at least one protective pad;

providing at least a first protective pad material in the at least the first protective pad trench;

depositing an insulating layer;

removing the at least the first protective pad material;

depositing a first tantalum oxide layer, a first portion of the first tantalum oxide layer residing in the at least the first protective pad trench;

removing a second portion of the first tantalum oxide layer outside of the at least the first protective pad trench using at least one of a first tantalum oxide reactive ion etch (RIE) and a first planarization;

providing a second dielectric layer on the insulating layer after the step of removing the first protective pad material, after the step of removing the at least the first protective pad material, and after the step of depositing the first tantalum oxide layer;

providing at least a second protective pad trench in the second dielectric layer;

providing at least a second protective pad material in the second protective pad trench;

removing the at least the second protective pad material in the second protective pad trench thereby exposing a third portion of the first tantalum oxide layer; and

depositing a second tantalum oxide layer, a portion of the second tantalum oxide layer residing in the second protective pad trench;

removing an external portion of the second tantalum oxide layer outside of the second protective pad trench using at least one of a second tantalum oxide RIE and a second planarization.

11. A method for providing heat assisted magnetic recording (HAMR) transducer having air-bearing surface (ABS) corresponding to an ABS location and being optically coupled with a laser, the method comprising:

providing a waveguide for directing light from the laser toward the ABS

providing a write pole having a pole tip with an ABS location facing surface, the pole tip being in a down track direction from the waveguide;

providing a first dielectric layer, a portion of the first dielectric layer residing on the pole tip;

providing a plurality of trenches in the dielectric layer, the plurality of trenches including a first protective pad trench and a plurality of coil trenches, the first protective pad trench having a location corresponding to the at least one protective pad;

depositing a first insulating layer in at least the first protective pad trench;

providing at least a first protective pad layer in the plurality of trenches;

performing a first planarization;

removing a first portion of the at least the first protective pad layer in the plurality of coil trenches;

plating a conductive layer in the plurality of coil trenches;

depositing a second insulating layer;

providing a second dielectric layer on the second insulating layer;

providing at least a second protective pad trench in the second dielectric layer;

providing at least a second protective pad layer in the second protective pad trench;

providing a shield having a shield pedestal adjacent to the first protective pad trench and including an ABS-facing surface, the ABS-facing surface of the shield pedestal being a closest portion of the shield to the ABS location.

12. The method of claim 11 wherein the at least one protective pad includes at least one of NiFe, tantalum oxide, CoNiFe, Ta and aluminum nitride.

13. The method of claim 11 wherein the at least one protective pad occupies a portion of the ABS.

14. The method of claim 11 wherein the step of providing the shield further includes:

providing a shield pedestal trench in the first dielectric layer, the first protective pad trench residing between the shield pedestal trench and the ABS location, the shield pedestal trench residing between the first protective pad trench and the plurality of coil trenches;

providing at least one shield material in the shield pedestal trench to form the shield pedestal.

15. The method of claim 14 wherein the step of providing the at least one shield material further includes:

plating the at least one shield material; and

performing a planarization.

16. The method of claim 14 wherein the step of providing the shield further includes forming a top shield, a first portion of the top shield adjoining the shield pedestal, a second portion of the top shield residing in the down track direction from the coil.

17. The method of claim 16 wherein the step of providing the top shield further includes:

removing at least a portion of the second dielectric layer to form a second shield trench, the second protective pad trench residing between the ABS location and the second shield trench; and

providing at least an additional shield material residing in the second shield trench contacting the at least one shield material in the first shield trench.

18. A method for providing heat assisted magnetic recording (HAMR) transducer having air-bearing surface (ABS) corresponding to an ABS location and being optically coupled with a laser, the method comprising:

providing a waveguide for directing light from the laser toward the ABS

providing a write pole having a pole tip with an ABS location facing surface, the pole tip being in a down track direction from the waveguide;

providing a first dielectric layer, a portion of the first dielectric layer residing on the pole tip;

providing a plurality of trenches in the dielectric layer, the plurality of trenches including a first protective pad trench and a plurality of coil trenches, the first protective pad trench having a location corresponding to the at least one protective pad;

depositing a first insulating layer in at least the first protective pad trench;

providing at least a first protective pad layer in the plurality of trenches;

performing a first planarization;

removing a first portion of the at least the first protective pad layer in the plurality of coil trenches;

plating a conductive layer in the plurality of coil trenches;

depositing a second insulating layer;

providing a second dielectric layer on the second insulating layer;

providing at least a second protective pad trench in the second dielectric layer;

providing at least a second protective pad layer in the second protective pad trench; and

providing a shield having a shield pedestal adjacent to the first protective pad trench, the shield being a top shield, a first portion of the top shield adjoining the shield pedestal, a second portion of the top shield residing in the down track direction from the coil, the step of providing the shield further including

providing a shield pedestal trench in the first dielectric layer, the first protective pad trench residing between the shield pedestal trench and the ABS location, the shield pedestal trench residing between the first protective pad trench and the plurality of coil trenches; and

providing at least one shield material in the shield pedestal trench to form the shield pedestal;

wherein the step of providing the at least one protective pad further includes:

removing a second portion of the at least the first protective pad layer in the first protective pad trench before the step of providing the second dielectric layer and before the step of providing the top shield;

depositing a first tantalum oxide layer before the step of providing the top shield, a first portion of the first tantalum oxide layer residing in the first protective pad trench;

removing a second portion of the first tantalum oxide layer outside of the first protective pad trench using at least one of a first tantalum oxide reactive ion etch (RIE) and a first planarization, the step of removing the second portion of the first tantalum oxide layer being performed before the step of providing the second dielectric layer and before the step of providing the top shield;

removing the at least the second protective pad layer in the second protective pad trench before the step of providing the top shield;

depositing a second tantalum oxide layer before the step of providing the top shield, a portion of the second tantalum oxide layer residing in the second protective pad trench; and

removing an external portion of the second tantalum oxide layer outside of the second protective pad trench using at least one of a second tantalum oxide RIE and a second planarization, the step of removing the external portion of the second tantalum oxide layer being performed before the step of providing the second dielectric layer and before the step of providing the top shield.

19. The method of claim 18 wherein the steps of removing the second portion of the at least the first protective layer, depositing the first tantalum oxide layer and removing the second portion of the first tantalum oxide layer are performed before the step of providing the shield pedestal trench.

20. The method of claim 18 wherein the steps of removing the second portion of the at least the first protective layer, depositing the first tantalum oxide layer, removing the second portion of the first tantalum oxide layer, removing the at least the second protective pad layer, depositing the second tantalum oxide layer and removing the external portion of the second tantalum oxide layer are performed after the steps of providing the shield pedestal trench and providing the at least one shield material in the shield pedestal trench.

Assignments (9)