IP Library Granted Patent US 9,876,193
Granted Patent B2
US 9,876,193 · App. 14/055,845 · Granted Jan 23, 2018

Thin-film device

Inventors: Jing-Yi Yan (Hsinchu County, TW); Chen-Yu Chiang (Taoyuan County, TW); Wen-Tung Wang (Hsinchu County, TW); Bo-Cheng Kung (Tainan, TW); Hung-Chien Lin (Tainan, TW); Liang-Hsiang Chen (Taichung, TW)
Assignee: Industrial Technology Research Institute
H01L51/5256H01L51/003H01L51/0097H01L2251/55Y02E10/549Y10T428/24942
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Quick Facts
Patent No.
US 9,876,193
App. No.
14/055,845
Granted
Jan 23, 2018
Kind
B2
Abstract

A thin-film device may include a carrier, a release layer, a stacking structure, and a flexible substrate. The release layer may be overlaid on the carrier, and the stacking structure is overlaid on the release layer. The stacking structure may include a first protective layer and a second protective layer, wherein the refractive index of the first protective layer exceeds that of the second protective layer. The flexible substrate may be overlaid on the release layer.

Claims (47)

1. A thin-film device, comprising:

a carrier;

a release layer overlaid on the carrier;

a first stacking structure, overlaid on the release layer, comprising:

a first protective layer;

a second protective layer, in contact with the first protective layer, wherein a refractive index of the first protective layer is greater than a refractive index of the second protective layer; and

a fifth protective layer, in contact with the second protective layer, wherein a refractive index of the fifth protective layer is greater than the refractive index of the second protective layer; and

a flexible substrate overlaid on the first stacking structure, wherein the first protective layer is overlaid on the release layer, the second protective layer is overlaid on the first protective layer, the fifth protective layer is overlaid on the second protective layer, and an absolute value of the refractive index of the first protective layer minus a refractive index of the release layer is greater than an absolute value of the refractive index of the second protective layer minus the refractive index of the release layer, wherein a reflectivity of the first stacking structure to a light beam passing there through is at least 50%.

2. The thin-film device as claimed in claim 1 , wherein a ratio of the refractive index of the first protective layer to the refractive index of the second protective layer is greater than 1.05.

3. The thin-film device as claimed in claim 1 , wherein the first protective layer comprises silicon nitride, silicon oxide, titanium oxide, niobium oxide, or a combination thereof, and the second protective layer comprises silicon nitride, silicon oxide, titanium oxide, niobium oxide, or a combination thereof.

4. The thin-film device as claimed in claim 1 , wherein a thickness of the first protective layer is from 20 nm to 350 nm, and a thickness of the second protective layer is from 20 nm to 350 nm.

5. The thin-film device as claimed in claim 1 , wherein a ratio of a thickness of the first protective layer to that of the second protective layer is from 0.1 to 5.

6. The thin-film device as claimed in claim 1 , further comprising a second stacking structure overlaid on the flexible substrate, and the second stacking structure comprises:

a third protective layer; and

a fourth protective layer in contact with the third protective layer, wherein a refractive index of the third protective layer is different from a refractive index of the fourth protective layer.

7. The thin-film device as claimed in claim 6 , further comprising an electronic device overlaid on the second stacking structure.

8. The thin-film device as claimed in claim 6 , wherein the second stacking structure further comprises a sixth protective layer, wherein the third protective layer is overlaid on the flexible substrate, the fourth protective layer is overlaid on the third protective layer, the sixth protective layer is overlaid on the fourth protective layer, and a refractive index of the sixth protective layer is different from the refractive index of the fourth protective layer.

9. The thin-film device as claimed in claim 6 , wherein the refractive index, material, and a thickness of the first protective layer and of the third protective layer are the same, and the refractive index, material, and a thickness of the second protective layer and of the fourth protective layer are the same.

10. A thin-film device, comprising:

a carrier;

a release layer overlaid on the carrier;

a plurality of first stacking structures overlaid on each other and overlaid on the release layer, and each of the first stacking structures comprising:

a first protective layer;

a second protective layer in contact with the first protective layer, wherein a refractive index of the first protective layer is greater than a refractive index of the second protective layer; and

a fifth protective layer, in contact with the second protective layer, wherein a refractive index of the fifth protective layer is greater than the refractive index of the second protective layer; and

a flexible substrate overlaid on the first stacking structures, wherein the first protective layers and the second protective layer are alternately overlaid on each other, one of the first protective layers is overlaid on and in contact with the release layer, one of the second protective layers is overlaid on and in contact with the one of the first protective layers, one of the fifth protective layers is overlaid on and in contact with the one of the second protective layers, and an absolute value of the refractive index of the first protective layer minus a refractive index of the release layer is greater than an absolute value of the refractive index of the second protective layer minus the refractive index of the release layer, wherein a reflectivity of the first stacking structure to a light beam passing there through is at least 50%.

11. The thin-film device as claimed in claim 10 , comprising only two first stacking structures.

12. The thin-film device as claimed in claim 10 , wherein a ratio of the refractive index of the first protective layer to the refractive index of the second protective layer is greater than 1.05.

13. The thin-film device as claimed in claim 10 , wherein the first protective layer comprises silicon nitride, silicon oxide, titanium oxide, niobium oxide, or a combination thereof, and the second protective layer comprises silicon nitride, silicon oxide, titanium oxide, niobium oxide, or a combination thereof.

14. The thin-film device as claimed in claim 10 , wherein a thickness of the first protective layer is from 20 nm to 350 nm and a thickness of the second protective layer is from 20 nm to 350 nm.

15. The thin-film device as claimed in claim 10 , wherein a ratio of a thickness of the first protective layer to that of the second protective layer is from 0.1 to 5.

16. The thin-film device as claimed in claim 10 , wherein one of the fifth protective layers is in contact with the flexible substrate, and the first protective layers, the second protective layers, and the fifth protective layers are alternately overlaid on each other.

17. The thin-film device as claimed in claim 10 , further comprising a plurality of second stacking structures, alternately overlaid on each other, overlaid on the flexible substrate, and each of the second stacking structures comprising:

a third protective layer; and

a fourth protective layer in contact with the third protective layer, wherein a refractive index of the third protective layer is different from a refractive index of the fourth protective layer;

wherein the third protective layers and the fourth protective layers are alternately overlaid on each other.

18. The thin-film device as claimed in claim 17 , further comprising an electronic device overlaid on the second stacking structures.

19. The thin-film device as claimed in claim 18 , wherein the second stacking structure further comprises a sixth protective layer, wherein one of the third protective layers is in contact with the flexible substrate, one of the sixth protective layers is in contact with the electronic device, and the refractive index of the sixth protective layer and that of the fourth protective layer are different, wherein the third protective layers, the fourth protective layers, and the sixth protective layer are alternately overlaid on each other.

20. The thin-film device as claimed in claim 17 , wherein the refractive index, material, and a thickness of the first protective layer and of the third protective layer are the same, and the refractive index, material, and a thickness of the second protective layer and of the fourth protective layer are the same.

21. A thin-film device, comprising:

a carrier;

a release layer overlaid on the carrier;

a first stacking structure, overlaid on the release layer, comprising:

a first protective layer;

a second protective layer, overlaid on and in contact with the first protective layer; and

a fifth protective layer, overlaid on and in contact with the second protective layer, wherein a refractive index of the first protective layer is greater than a refractive index of the second protective, and a refractive index of the fifth protective layer is greater than the refractive index of the second protective layer, wherein a thickness of the first protective layer is from 20 nm to 350 nm, and a thickness of the second protective layer is from 20 nm to 350 nm, wherein a ratio of a thickness of the first protective layer to that of the second protective layer is from 0.1 to 5; and

a flexible substrate overlaid on the first stacking structure, wherein the first stacking structure is between the release layer and the flexible substrate, and a reflectivity of the first stacking structure to a light beam passing there through is at least 50%.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 15, 2022
From: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
To: HANNSTAR DISPLAY CORPORATION
Reel/Frame 059365/0305 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 22, 2013
From: YAN, JING-YI; CHIANG, CHEN-YU; WANG, WEN-TUNG; KUNG, BO-CHENG; LIN, HUNG-CHIEN; CHEN, LIANG-HSIANG
To: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Reel/Frame 031560/0165 →
Priority Claims (1)
TW 102117838 A · May 21, 2013 · national
Continuity (1)
Related Publication 20140349091A1 · Nov 27, 2014