IP Library Granted Patent US 9,293,627
Granted Patent B1
US 9,293,627 · App. 14/056,023 · Granted Mar 22, 2016

Sub-wavelength antenna enhanced bilayer graphene tunable photodetector

Inventors: Thomas Edwin Beechem, III (Albuquerque, NM); Stephen W. Howell (Albuquerque, NM); David W. Peters (Albuquerque, NM); Paul Davids (Albuquerque, NM); Taisuke Ohta (Albuquerque, NM)
Assignee: Sandia Corporation
H01L31/1136H01L29/1606H01L29/66037H01L29/66045H01L31/0232H01L51/428H01L29/66015
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Quick Facts
Patent No.
US 9,293,627
App. No.
14/056,023
Granted
Mar 22, 2016
Kind
B1
Abstract

The integration of bilayer graphene with an absorption enhancing sub-wavelength antenna provides an infrared photodetector capable of real-time spectral tuning without filters at nanosecond timescales.

Claims (21)

1. A tunable photodetector, comprising:

a bilayer graphene layer;

a gate dielectric layer disposed on the frontside of the bilayer graphene layer;

a resonant sub-wavelength antenna top gate disposed on the gate dielectric layer, wherein the resonant sub-wavelength antenna top gate and the gate dielectric layer are adapted to amplify the absorption of incident light in the bilayer graphene layer by resonant surface mode coupling;

a conductive back gate disposed on the backside and insulated from the bilayer graphene layer for applying an electric field with the top gate across the bilayer graphene layer to tune a bandgap therein; and

a source and a drain disposed on the bilayer graphene layer with the gate dielectric layer therebetween, thereby forming a dual-gated field-effect transistor.

2. The tunable photodetector of claim 1 , wherein the bandgap is tunable from the mid-infrared to terahertz regime of the incident light.

3. The tunable photodetector of claim 1 , wherein the incident light has a wavelength greater than 5 microns.

4. The tunable photodetector of claim 1 , wherein the bilayer graphene layer comprises epitaxial graphene grown on a semi-insulating silicon carbide substrate.

5. The tunable photodetector of claim 4 , wherein the conductive back gate comprises a region of conductive ions implanted in the semi-insulating silicon carbide substrate.

6. The tunable photodetector of claim 5 , further comprising a back metal reflector on the back side of the ion-implanted semi-insulating silicon carbide substrate.

7. The tunable photodetector of claim 4 , wherein the conductive back gate comprises a highly doped silicon carbide substrate and wherein the semi-insulating substrate comprises an undoped silicon carbide layer grown on the highly doped silicon carbide substrate.

8. The tunable photodetector of claim 4 , wherein the semi-insulating silicon carbide substrate is back-thinned and a metal layer is deposited on the backside of the back-thinned silicon carbide substrate to provide the conductive back gate and a back metal reflector.

9. The tunable photodetector of claim 1 , wherein the sub-wavelength antenna comprises a conductive layer patterned with a periodic array of sub-wavelength apertures.

10. The tunable photodetector of claim 9 , wherein the sub-wavelength antenna comprises a frequency specific surface structure.

11. The tunable photodetector of claim 9 , wherein the periodic array of sub-wavelength apertures has a periodicity of less than one-third the wavelength of the incident light.

12. The tunable photodetector of claim 9 , wherein the periodic array of sub-wavelength apertures comprises a connected periodic loop-aperture geometry.

13. The tunable photodetector of claim 1 , wherein the gate dielectric layer comprises SiO 2 , Al 2 O 3 , Si 3 N 4 , or HfO 2 .

14. The tunable photodetector of claim 1 , wherein the thickness of the gate dielectric layer is less than 100 nanometers.

15. The tunable photodetector of claim 1 , wherein the conductive back gate provides a reflecting backplane that is coupled with the sub-wavelength antenna to further enhance absorption of the incident light in the bilayer graphene layer.

16. The tunable photodetector of claim 1 , further comprising a reflecting backplane disposed on the backside of the conductive back gate that is coupled with the sub-wavelength antenna to further enhance absorption of the incident light in the bilayer graphene layer.

Assignments (3)
CHANGE OF NAME Recorded May 24, 2018
From: SANDIA CORPORATION
To: NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC
Reel/Frame 046232/0273 →
CONFIRMATORY LICENSE Recorded Jun 16, 2015
From: SANDIA CORPORATION
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 035844/0822 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 5, 2015
From: BEECHEM, THOMAS EDWIN, III; HOWELL, STEPHEN W.; PETERS, DAVID W.; DAVIDS, PAUL; OHTA, TAISUKE
To: SANDIA CORPORATION
Reel/Frame 034899/0741 →
Continuity (1)
Provisional Application 61732667 · Dec 3, 2012