Piezoelectric element
View Patent ↗A piezoelectric element includes, in sequence, a substrate containing metallic material; a first intermediate layer; a lower electrode layer; a piezoelectric layer; and an upper electrode layer. The first intermediate layer contains, as a main component, a nitrogen-containing silicon oxide having a silicon-nitrogen bond. The lower electrode layer contains a perovskite-type oxide in (100) preferential orientation. The piezoelectric layer contains a perovskite-type oxide in (001) or (100) preferential orientation.
1. A piezoelectric element comprising, in sequence:
a substrate containing metallic material;
a first intermediate layer containing, as a main component, a nitrogen-containing silicon oxide having a silicon-nitrogen bond;
a lower electrode layer containing a perovskite-type oxide in (100) preferential orientation;
a piezoelectric layer containing a perovskite-type oxide in (001) or (100) preferential orientation; and
an upper electrode layer.
2. The piezoelectric element according to claim 1 , wherein the substrate contains titanium.
3. The piezoelectric element according to claim 1 , wherein the lower electrode layer is free from titanium.
4. The piezoelectric element according to claim 1 , wherein the lower electrode layer contains lanthanum nickelate as a main component.
5. The piezoelectric element according to claim 1 , wherein the piezoelectric layer contains lead zirconate titanate as a main component.
6. The piezoelectric element according to claim 1 , further comprising a second intermediate layer disposed between the first intermediate layer and the lower electrode layer, the second intermediate layer having a smaller contact angle with an ether-based solvent than the first intermediate layer.