IP Library Granted Patent US 9,368,659
Granted Patent B2
US 9,368,659 · App. 14/061,803 · Granted Jun 14, 2016

Back contact design for solar cell, and method of fabricating same

Inventors: Tzu-Huan Cheng (Kaohsiung, TW); Chia-Hung Tsai (Kaohsiung, TW)
Assignee: TSMC Solar Ltd.
H01L31/0322H01L31/02167H01L31/022425H01L31/0749H01L31/1864H01L31/1868Y02E10/541Y02P70/521
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Quick Facts
Patent No.
US 9,368,659
App. No.
14/061,803
Granted
Jun 14, 2016
Kind
B2
Abstract

A method includes depositing spacers at a plurality of locations directly on a back contact layer over a solar cell substrate. An absorber layer is formed over the back contact layer and the spacers. The absorber layer is partially in contact with the spacers and partially in direct contact with the back contact layer. The solar cell substrate is heated to form voids between the absorber layer and the back contact layer at the locations of the spacers.

Claims (31)

1. A method comprising:

depositing spacers at a plurality of locations directly on a back contact layer over a solar cell substrate;

forming an absorber layer over the back contact layer and the spacers, the absorber layer partially in contact with the spacers and partially in direct contact with the back contact layer; and

heating the solar cell substrate to form voids between the absorber layer and the back contact layer at the locations of the spacers.

2. The method of claim 1 , wherein the step of depositing spacers includes spraying spacer material particles on the back contact layer.

3. The method of claim 2 , wherein the spacer material comprises a metal oxide.

4. The method of claim 2 , wherein the spacer material comprises silicon dioxide or high resistance compound semiconductor.

5. The method of claim 2 , wherein the spacer material particles have sizes from about 100 nm to about 500 nm.

6. The method of claim 1 , wherein step of depositing spacers includes spraying nanoparticles on the back contact layer.

7. The method of claim 1 , wherein the step of depositing spacers includes:

depositing a silicon dioxide film or isolation film on the back contact layer; and

using photolithography to remove portions of the silicon dioxide film or isolation film outside of the locations of the spacers.

8. The method of claim 1 , wherein the step of depositing spacers includes covering from about 70% to about 80% of the back contact layer with spacer material.

9. The method of claim 1 , wherein the heating step includes heating the substrate to a temperature from about 400° C. to about 600° C.

10. The method of claim 1 , wherein:

the step of depositing spacers includes spraying silicon dioxide particles having sizes from about 100 nm to about 500 nm on about 70% to about 80% of the back contact layer; and

the heating step includes heating the substrate to a temperature from about 400° C. to about 600° C.

11. A method comprising:

spraying spacer material at a plurality of locations directly on a back contact layer over a solar cell substrate; and

forming an absorber layer over the back contact layer and the spacer material, so that from about 10% to about 80% of the absorber layer is in direct contact with the spacer material and from about 90% to about 20% of the absorber layer is in direct contact with the back contact layer.

12. The method of claim 11 , further comprising heating the solar cell substrate to form voids between the absorber layer and the back contact layer at the locations of the spacers.

13. The method of claim 11 , wherein the spacer material comprises silicon dioxide.

14. The method of claim 11 , wherein the spacer material comprises particles having sizes from about 100 nm to about 500 nm.

15. A method comprising:

spraying spacer material at a plurality of locations directly on a back contact layer over a solar cell substrate;

forming an absorber layer over the back contact layer and the spacer material, so that from about 10% to about 80% of the absorber layer is in direct contact with the spacer material; and

heating the solar cell substrate to form voids between the absorber layer and the back contact layer at the locations of the spacer material.

16. The method of claim 15 , wherein the heating step includes heating the substrate to a temperature from about 400° C. to about 600° C.

17. The method of claim 15 , wherein the spacer material comprises silicon dioxide.

18. The method of claim 15 , wherein the step of depositing spacers includes spraying nanoparticles on the back contact layer.

19. The method of claim 15 , wherein the spraying is performed by one or more nozzles within a same process chamber in which the back contact layer is deposited over the solar cell substrate.

Assignments (2)
MERGER Recorded Jun 16, 2016
From: TSMC SOLAR LTD.
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 039050/0299 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 24, 2013
From: CHENG, TZU-HUAN; TSAI, CHIA-HUNG
To: TSMC SOLAR LTD.
Reel/Frame 031466/0305 →
Continuity (1)
Related Publication 20150114458A1 · Apr 30, 2015