Polishing method of non-oxide single-crystal substrate
View Patent ↗There is provided a polishing method for polishing a non-oxide single-crystal substrate such as a silicon carbide single-crystal substrate at a high polishing rate to obtain a high-quality surface that is smooth and excellent in surface properties. This polishing method is a method of supplying a polishing liquid to a polishing pad not including abrasive grains to bring a surface to be polished of the non-oxide single-crystal substrate and the polishing pad into contact with each other and polishing the surface to be polished by a relative movement between them, the method characterized in that the polishing liquid comprises: an oxidant whose redox potential is 0.5 V or more and which contains a transition metal; and water, and does not contain abrasive grains.
1. A method of polishing a surface of a silicon carbide (SiC) non-oxide single-crystal substrate, the method comprising
polishing the surface with a polishing pad in the presence of a polishing liquid by moving the polishing pad relative to the surface,
wherein the polishing liquid comprises a permanganate ion as an oxidant whose redox potential is 0.5 V or more and which contains a transition metal; and water, and
wherein the polishing pad and the polishing liquid do not contain abrasive grains.
2. The method of claim 1 , wherein the permanganate ion is present in the polishing liquid in an amount of not less than 0.05 mass % nor more than 5 mass %.
3. The method of claim 1 , wherein the polishing liquid has a pH of 11 or less.
4. The method of claim 3 , wherein the polishing liquid has a pH of 5 or less.
5. The method of claim 1 , wherein the oxidant is potassium permanganate or sodium permanganate.
6. The method of claim 2 , wherein the permanganate ion is present in an amount of not less than 0.1 mass % nor more than 4 mass %.
7. The method of claim 2 , wherein the permanganate ion is present in an amount of not less than 0.2 mass % nor more than 3.5 mass %.
8. The method of claim 2 , wherein the permanganate ion is present in an amount of not less than 1.0 mass % nor more than 3.5 mass %.
9. The method of claim 4 , wherein the polishing liquid has a pH of 3 or less.