Reflective mask and method for manufacturing the same
A reflective mask includes a substrate and a multilayer reflective film formed on the substrate. An absorption pattern is formed on the multilayer reflective film. A recess is formed in the multilayer reflective film in a peripheral region of the absorption pattern.
1. A reflective mask comprising:
a substrate;
a multilayer reflective film formed on the substrate;
an absorption pattern formed on the multilayer reflective film;
an exposed surface portion of the multilayer reflective film formed in a peripheral region of the absorption pattern; and
a recess formed in the multilayer reflective film in the peripheral region of the absorption pattern.
2. The reflective mask according to claim 1 , wherein the recess has a planar shape identical to or larger than that of the absorption pattern.
3. The reflective mask according to claim 1 , wherein the recess is configured to reflect extreme ultraviolet light at a reflectance of 40 to 50%.
4. The reflective mask according to claim 1 , wherein the absorption pattern corresponds to a circuit pattern arranged at a pitch of 352 nm or greater.
5. The reflective mask according to claim 1 , wherein the recess is spaced apart from the absorption pattern by a distance of 72 nm to 128 nm.
6. The reflective mask according to claim 1 , wherein the substrate includes
a circuit pattern region,
a scribe region surrounding the circuit pattern region, and
a shield region surrounding the scribe region, and
the absorption pattern and the recess are arranged in the circuit pattern region.
7. The reflective mask according to claim 1 , further comprising
a further absorption pattern formed on the multilayer reflective film,
wherein the exposed surface portion of the multilayer reflective film is formed in a further peripheral region of the further absorption pattern.
8. The reflective mask according to claim 1 , further comprising
a further recess formed in the multilayer reflective film in the peripheral region of the absorption pattern, wherein the further recess is located opposite to the recess with respect to the absorption pattern along a plane that is parallel to a normal of a surface of the substrate.
9. A method for manufacturing a reflective mask, comprising:
forming a multilayer reflective film on a substrate;
forming an absorption layer on the multilayer reflective film;
patterning the absorption layer to form an absorption pattern; and
forming a recess in the multilayer reflective film in a peripheral region of the absorption pattern such that an exposed surface portion of the multilayer reflective film is formed in the peripheral region of the absorption pattern.