Planar polarization rotator
View Patent ↗An optical polarization rotator includes first and second optical waveguide ribs located along a planar surface of a substrate. The second optical waveguide rib is located farther from the surface than the first optical waveguide rib. First segments of the optical waveguide ribs form a vertical stack over the substrate, and second segments of the optical waveguide ribs are offset laterally in a direction along the planar surface. The first and second optical waveguide ribs are formed of materials with different bulk refractive indexes.
1. A method, comprising:
forming an optical layer over a first optical waveguide rib located along a planar surface of a substrate, the optical layer and first optical waveguide rib being formed of materials with different bulk refractive indexes; and
etching the optical layer to form a second optical waveguide rib such that first segments of the optical waveguide ribs form a stack vertically oriented with respect to the planar surface and second segments of the optical waveguide ribs are relatively laterally offset along the planar surface; and
wherein the method includes fabricating an optical polarization rotator including the optical waveguide ribs.
2. The method of claim 1 , further comprising forming a spacer layer over the first optical waveguide rib prior to forming the optical layer, the spacer layer being formed of a material with a different bulk refractive index than the materials of the optical layer and the first optical waveguide layer.
3. The method of claim 1 , wherein the first optical waveguide and a portion of the planar surface are formed of the same optical material.
4. The method of claim 3 , wherein the etching is such that the optical material functions as a stopping layer during the etching.
5. The method of claim 1 , wherein one of the optical layer and the first optical waveguide rib is formed of a semiconductor and the other of the optical layer and the first optical waveguide rib is formed of a dielectric.
6. The method of claim 1 , wherein third and fourth segments of the first optical waveguide rib are located lateral to the second optical waveguide rib and are laterally wider than the first and second segments of the first optical waveguide rib, the first and second segments of the first optical waveguide rib being connected between the third and fourth segments thereof.
7. A method, comprising:
forming an optical layer over a first optical waveguide rib located along a planar surface of a substrate, the optical layer and first optical waveguide rib being formed of materials with different bulk refractive indexes; and
etching the optical layer to form a second optical waveguide rib such that first segments of the optical waveguide ribs form a stack vertically oriented with respect to the planar surface and second segments of the optical waveguide ribs are relatively laterally offset along the planar surface; and
forming a spacer layer over the first optical waveguide rib prior to forming the optical layer, the spacer layer being formed of a material with a different bulk refractive index than the materials of the optical layer and the first optical waveguide layer.
8. A method, comprising:
forming an optical layer over a first optical waveguide rib located along a planar surface of a substrate, the optical layer and first optical waveguide rib being formed of materials with different bulk refractive indexes; and
etching the optical layer to form a second optical waveguide rib such that first segments of the optical waveguide ribs form a stack vertically oriented with respect to the planar surface and second segments of the optical waveguide ribs are relatively laterally offset along the planar surface; and
wherein the first optical waveguide and a portion of the planar surface are formed of the same optical material.
9. The method of claim 8 , wherein the etching is such that the optical material functions as a stopping layer during the etching.
10. A method, comprising:
forming an optical layer over a first optical waveguide rib located along a planar surface of a substrate, the optical layer and first optical waveguide rib being formed of materials with different bulk refractive indexes; and
etching the optical layer to form a second optical waveguide rib such that first segments of the optical waveguide ribs form a stack vertically oriented with respect to the planar surface and second segments of the optical waveguide ribs are relatively laterally offset along the planar surface; and
wherein one of the optical layer and the first optical waveguide rib is formed of a semiconductor and the other of the optical layer and the first optical waveguide rib is formed of a dielectric.