NON-DEFORMABLE PATTERNED TEMPLATE
A non-deformable patterned template includes a stable mesh, wherein the stable mesh is resistant to deformation; a polymer sheet with the stable mesh embedded therein, wherein the polymer sheet is formed using a liquid polymer adapted to receive the stable mesh, and wherein the liquid polymer is cured after the stable mesh has been placed within the liquid polymer; and a surface pattern on at least one face of the polymer sheet.
1 . A non-deformable patterned template, comprising:
a stable mesh, wherein the stable mesh is resistant to deformation;
a polymer sheet with the stable mesh embedded therein, wherein the polymer sheet is formed using a liquid polymer adapted to receive the stable mesh, and wherein the liquid polymer is cured after the stable mesh has been placed within the liquid polymer; and
a surface pattern on at least one face of the polymer sheet.
2 . The template of claim 1 , wherein the surface pattern includes at least two fiducial marks.
3 . The template of claim 1 , wherein the template is resistant to deformation due to changes in temperature of the template or water content of the template in response to changes in the environment.
4 . The template of claim 1 , wherein the template is resistant to deformation due to applied tension to the template.
5 . The template of claim 1 , wherein the template is resistant to deformation due to changes in temperature of the template in response to applied radiation.
6 . The template of claim 5 , wherein the radiation includes infra-red light, visible light, electromagnetic induction, or ultra-violet light.
7 . The template of claim 1 , wherein the template is resistant to deformation due to changes in temperature of the template in response to applied heat.
8 . The template of claim 6 , wherein the applied heat includes radiation, convective, conductive, or resistive heating.
9 . The template of claim 1 , wherein the mesh includes one or more fiducial marks that are aligned to the at least two fiducial marks of the surface pattern.
10 . The template of claim 1 , wherein the mesh is transparent to allow actinic radiation.
11 . The template of claim 1 , wherein the mesh is formed by producing a pattern of openings in a continuous sheet.
12 . The template of claim 11 , wherein the mesh defines a plurality of anchor points corresponding to the portions of the continuous sheet remaining after the openings have been formed.
13 . The mesh of claim 11 , wherein the anchor points limit the deformation of the polymer sheet to regions of the template corresponding to the openings of the mesh.
14 . The mesh of claim 11 , wherein the pattern of openings is a cross-hatch, hexagonal, diamond-shaped, circular, oval, rectangular, or polygonal.
15 . The template of claim 11 , wherein the pattern of openings is structured to cause the mesh to function as a flexure.