Printed material constrained by well structures and devices including same
View Patent ↗A first patterned contact layer, for example a gate electrode, is formed over an insulative substrate. Insulating and functional layers are formed at least over the first patterned contact layer. A second patterned contact layer, for example source/drain electrodes, is formed over the functional layer. Insulative material is then selectively deposited over at least a portion of the second patterned contact layer to form first and second wall structures such that at least a portion of the second patterned contact layer is exposed, the first and second wall structures defining a well therebetween. Electrically conductive or semiconductive material is deposited within the well, for example by jet-printing, such that the first and second wall structures confine the conductive or semiconductive material and prevent spreading and electrical shorting to adjacent devices. The conductive or semiconductive material is in electrical contact with the exposed portion of the second patterned contact layer to form, e.g., an operative transistor.
1. A method of forming a transistor device, comprising:
forming a gate electrode over a substrate;
forming a gate dielectric layer over at least said gate electrode;
depositing a functional layer over at least a portion of said substrate, said gate electrode, and said gate dielectric;
selectively depositing a patterned contact layer over said functional layer, said patterned contact layer defining first and second electrodes of said active device, wherein said first electrode is a source electrode, said second electrode is a drain electrode;
selectively additively depositing, by printing, insulating material over at least a portion of said patterned contact layer to form first and second wall structures such that at least a portion of said patterned contact layer over said first electrode and at least a portion of said patterned contact layer over said second electrode are exposed, said first and second wall structures defining a well region therebetween, and said exposed portions of said patterned contact layer over said first and second electrodes are within said well region; and
selectively depositing a semiconductor layer from a solution within said well region such that said first and second wall structures confine said semiconductor layer therein, and said semiconductor layer within said well region is in physical and electrical contact with said exposed portion of said patterned contact layer over said first and second electrodes.
2. The method of claim 1 , wherein the functional layer is a hydrophobic layer.
3. The method of claim 2 , wherein the hydrophobic layer is selected from the group consisting of: hydrophobic silane, nonpolar polymer, silazane, polysilsesquioxane, and fluorocarbon.
4. The method of claim 1 , wherein the functional layer is a hydrophilic layer.
5. The method of claim 4 , wherein the hydrophilic layer is selected from the group consisting of: hydrophilic silane, polar polymer, polyethylene glycol, polyethylene oxide, and proteins.
6. The method of claim 1 , wherein said functional layer comprises a material that may be deposited in a liquid phase and transition to a solid phase following deposition.
7. The method of claim 1 , wherein said first and second wall structures are deposited in a liquid phase and transition to a solid phase following deposition.
8. The method of claim 7 , wherein said first and second wall structures each comprise a wax material.
9. The method of claim 1 , wherein said first and second wall structures are deposited to be substantially thicker than said source and drain electrodes.
10. The method of claim 1 , wherein said first and second wall structures are deposited with a thickness in a range between 0.5 microns and 5.0 microns above a surface of the functional layer.
11. The method of claim 1 , wherein the well region has a width in the range between 10 microns and 500 microns.
12. The method of claim 1 , wherein the semiconductor layer comprises a material that is deposited in a liquid phase and transitions to a solid phase following deposition.
13. The method of claim 1 , wherein the semiconductor layer includes precursors selected from the group consisting of: pentacene; zinc oxide; silicon; carbon nanotubes; silicon nanowires; silicon nano-belts; grapheme; silicon nano particles; silicon nano-rods; and silicon nano-ribbons.