Test structures for measuring near field transducer disc length
View Patent ↗Systems and methods for using NFT disc test structures for controlling NFT disc length during manufacture of an HAMR writer are disclosed. An NFT is manufactured concurrently with one or more pairs of pin-disc and disc-less test structures. The NFT disc and pin dimensions may be substantially similar to the pin and disc dimensions of the pin-disc test structure. The disc length of the pin-disc test structure is measured as a function of the difference in resistance between the two test structures and other parameters. Capturing the disc length variation subsequently enables adjustment of the NFT electronic lapping guide stripe height to reduce length variation in the NFT pin.
1. A system for controlling the disc length of a Near Field Transducer (NFT), comprising:
a first test structure comprising a disc and a pin; and
a second test structure comprising a pin;
wherein the first test structure disc length is determined based on a measured resistance of the first test structure and a measured resistance of the second test structure; and
wherein the first test structure disc length is approximately the same as the NFT disc length.
2. The system of claim 1 , wherein the first test structure, the second test structure, and the NFT are formed on a same wafer.
3. The system of claim 1 , wherein the second test structure is approximately the same length and shape as the first test structure.
4. The system of claim 3 , wherein the first test structure and the second test structure each comprise two contacts and two leads.
5. The system of claim 4 , wherein the resistance of the first test structure depends on the pin length, the pin width, disc diameter, disc length, and total leads resistance.
6. The system of claim 5 , wherein the first test structure disc and pin are defined on the same disc film.
7. The system of claim 5 , wherein the first test structure disc is defined on a disc film, and wherein the first test structure pin is defined on a pin film.
8. The system of claim 5 , wherein the resistance of the first test structure further depends on the sheet resistance of the disc film and the sheet resistance of the pin film.
9. The system of claim 5 , wherein the first test structure and the second test structure are single resistor test structures.
10. The system of claim 5 , wherein the first test structure and the second test structure are linear series resistor test structures.
11. The system of claim 5 , wherein the first test structure and the second test structure are serpentine series resistor test structures.
12. The system of claim 5 , wherein the first test structure and the second test structure are near four-point test structures.
13. The system of claim 5 , wherein the first test structure and the second test structure are true four-point test structures.