Second Schottky contact metal layer to improve GaN schottky diode performance
View Patent ↗A Schottky contact is disposed atop the surface of the semiconductor. A first Schottky contact metal layer is disposed atop a first portion of the semiconductor surface. A second Schottky contact metal is disposed atop a second portion of the surface layer and joins the first Schottky contact metal layer. A first. Schottky contact metal layer has a lower work function than the second Schottky contact metal layer.
1. A field-effect transistor (FET) comprising:
a substrate;
a first nitride-based semiconductor layer disposed atop the substrate, the first nitride-based semiconductor layer being of a first conductivity type and having a first doping concentration;
a second nitride-based semiconductor layer of the first conductivity type disposed atop a portion of the first nitride-based semiconductor layer, the second nitride-based semiconductor layer being a different nitride-based semiconductor layer than the first nitride-based semiconductor layer such that a heterojunction is formed between the first and second layers of nitride semiconductor;
a first Schottky contact metal layer having a first metal work function disposed on a top surface of the second nitride-based semiconductor layer, a first Schottky junction with a first barrier height being formed between the first Schottky contact metal layer and the second nitride-based semiconductor layer;
a second Schottky contact metal layer having a second metal work function disposed atop of and laterally surrounding the first Schottky contact metal layer, the second metal work function being higher than the first metal work function, a second Schottky junction with a second barrier height being formed between laterally surrounding portions of the second Schottky contact metal layer and the first nitride-based semiconductor layer; and
a metal layer disposed atop a planar surface of the first nitride-based semiconductor layer, an ohmic contact being formed between the metal layer and the first nitride-based semiconductor layer.
2. The FET of claim 1 wherein the first nitride-based semiconductor layer comprises gallium nitride.
3. The FET of claim 2 wherein the second nitride-based semiconductor layer comprises aluminum gallium nitride.
4. The FET of claim 1 , wherein the first Schottky contact metal layer is selected from the group consisting of aluminum, titanium, molybdenum and gold.
5. The FET of claim 1 , wherein the second Schottky contact metal layer is selected from the group consisting of nickel, palladium, a titanium-tungsten alloy, tantalum, rhenium, ruthenium and platinum.
6. The FET of claim 1 further comprising a buffer layer interposed between the substrate and the first nitride-based semiconductor layer.