Optical device
The invention is directed to the provision of an optical device in which provisions are made to form a gap between an optical waveguide and a substrate without having to form a groove or the like in the substrate and to prevent any stress from being applied to an optical element even when it is heated by a heater for temperature adjustment. More specifically, the invention provides an optical device includes a substrate, an optical element with an optical waveguide formed in a surface thereof that faces the substrate, bonding portions formed on the substrate at positions that oppose each other across the optical waveguide, a heater, formed on at least one of the optical element and the substrate, for heating the optical waveguide, and a micro bump structure formed from a metallic material, wherein the optical element is bonded to the bonding portions via the micro bump structure in such a manner that a gap is formed between the optical waveguide and the substrate.
1. An optical device comprising:
a substrate;
an optical element with an optical waveguide formed in a surface thereof that faces said substrate;
bonding portions formed on said substrate at positions that oppose each other across said optical waveguide;
a heater, formed on at least one of said optical element and said substrate, for heating said optical waveguide; and
a micro bump structure formed from a metallic material,
wherein said optical element is bonded to said bonding portions via said micro bump structure by surface activated bonding, so that an air layer surrounding three sides of said optical waveguide, is formed between said optical waveguide and said substrate, and
numerous interstices which connect said air layer to the outside and do not allow foreign matters to pass through are formed between said bonding portions and said optical element.
2. The optical device according to claim 1 , wherein said heater is formed on the surface of said optical element that faces said substrate.
3. The optical device according to claim 1 , wherein said micro bump structure is made of Au and formed on said bonding portions, and
said optical element includes an Au film for bonding to said micro bump structure.
4. The optical device according to claim 1 , wherein said micro bump structure is constructed from cylindrically shaped protrusions, each with a height of 1 to 5μm and with a diameter of 2 to 10μm, that are arranged at a pitch of 5 to 30μm.
5. The optical device according to claim 1 , wherein said heater is formed from an ITO film or an InTiO film.
6. The optical device according to claim 1 , wherein said heater is formed in the shape of a strip extending along a longitudinal direction of said optical waveguide, and said optical device further includes lead portions provided at predetermined spaced intervals along the longitudinal direction of said heater in order to apply a voltage to said heater.
7. The optical device according to claim 6 , wherein each of said lead portions has a connecting portion whose width increases with increasing distance from said heater.
8. The optical device according to claim 7 , further comprising voltage applying means for applying a voltage according to a pulse width modulation method to said lead portions.
9. The optical device according to claim 1 , wherein said substrate is a silicon substrate and said optical element is a wavelength conversion element, further comprising a semiconductor laser for introducing laser light into said wavelength conversion element.