Imaging spectropolarimeter
An imaging spectropolarimeter for examining targets with polarized light, the spectropolarimeter including a light source adapted to produce polarized light directed at a target. Embodiments also include a three-camera camera system defining a three-camera camera axis with a first camera unit comprising a first analyzer set at 0°, a lens and a first multi-pixel sensor, a second camera unit comprising a second analyzer set at 45°, a lens and a second multi-pixel sensor, and a third camera unit comprising a third analyzer set at 90°, a lens and a third multi-pixel sensor. At least two beam splitters adapted to direct a portion of polarized light reflected from the target to each of the first, second and third camera units. Preferred systems include a processor adapted to produce polarimetric images of the target utilizing intensity information collected by the multi-pixel sensors.
1 . An imaging spectropolarimeter for examining targets with polarized light, the spectropolarimeter comprising:
A) a light source adapted to produce polarized light directed at a target,
B) a three-camera system comprising:
1) a first camera unit comprising a first analyzer set at 0°, a lens and a first multi-pixel sensor,
2) a second camera unit comprising a second analyzer set at 45°, a lens and a second multi-pixel sensor,
3) a third camera unit comprising a third analyzer set at 90°, a lens and a third multi-pixel sensor,
C) at least two beam splitters adapted to direct a portion of polarized light reflected from the target to each of the first, second and third camera units,
D) a processor adapted to produce polarimetric images of the target utilizing intensity information collected by the multi-pixel sensors.
2 . The imaging spectropolarimeter as in claim 1 wherein the polarized light source is comprised of a light source, a filter and a polarizer.
3 . The imaging spectropolarimeter as in claim 1 wherein the camera system is adapted to monitor specular reflections.
4 . The imaging spectropolarimeter as in claim 1 wherein the camera system is adapted to monitor non-specular reflections.
5 . The imaging spectropolarimeter as in claim 1 wherein the first, second and third cameras are CCD cameras.
6 . The imaging spectropolarimeter as in claim 1 wherein the polarized light source supplies incident light in a range from ultra violet to near infrared.
7 . The imaging spectropolarimeter as in claim 1 wherein the system is applied in a medical field.
8 . The imaging spectropolarimeter as in claim 7 wherein the medical field is cancer detection and screening.
9 . The imaging spectropolarimeter as in claim 1 wherein the system is applied in a semiconductor field.
10 . The imaging spectropolarimeter as in claim 9 wherein the semiconductor field is one of the following fields: defect inspection, film thickness, and material characterization (surface roughness, refractive index, chemical composition).
11 . The imaging spectropolarimeter as in claim 1 wherein the system is applied in a defense field.
12 . The imaging spectropolarimeter as in claim 11 wherein the defense field include remote sensing and enhanced imaging.
13 . The imaging spectropolarimeter as in claim 1 wherein the light source is chosen from a group of light sources consisting of: broadband, laser diode and LED sources.
14 . The imaging spectropolarimeter as in claim 1 wherein each of the three camera units include a color CCD camera in order to get spectroscopic intensity information (red, green, blue).
15 . The imaging spectropolarimeter as in claim 1 wherein the system is adapted to provide for light intensity to be detected with fixed grating spectrometers with linear arrays to give spectroscopic intensity measurements.
16 . The imaging spectropolarimeter as in claim 1 wherein the system is adapted to provide for light intensity to be detected with fixed grating spectrometers with 2D CCD arrays to give spectroscopic intensity measurements.
17 . The imaging spectropolarimeter as in claim 1 wherein the system is adapted to provide for fields of view of the system to be controlled with zoom lenses in front of the cameras.
18 . The imaging spectropolarimeter as in claim 17 wherein spacial resolution of images are micron resolution for semiconductor applications.