Polymer and method for producing same
View Patent ↗The time when at least a monomer and a chain transfer agent are supplied in a reactor and the solution temperature in the reactor has reached a predetermined polymerization temperature is set as starting time (T 0 ), and the time when a process to terminate the polymerization is started is set as ending time (T 1 ). A polymerization initiator is supplied into the reactor between (T 0 ) and just before [(T 1 )−(T 0 )/2] and between [(T 1 )−(T 0 )/2] and (T 1 ). The total mass of the polymerization initiator supplied to the reactor between (T 0 ) and (T 1 ) is set as (I A ), and the total mass of the polymerization initiator supplied between [(T 0 −T 1 )/2] and (T 1 ) is set as (I B ). The (I A ) is set 50 to 100 mass % of the entire polymerization initiator. Using a production method in which 0.50<(I B )/(I A )<1.00 is satisfied, a polymer is produced at a high polymerization rate showing less variation of molecular weight and having less amount of chain transfer agent residue remaining at an end of the polymer chain.
1. A polymer, comprising:
a structural unit having a group to be modified by acid, comprising a structural unit derived from at least one monomer selected from the group consisting of 2-methyl-2-adamantyl (meth)acrylate, 2-ethyl-2-adamantyl (meth)acrylate, 1-(1′-adamantyl)-1-methylethyl (meth)acrylate, 1-methyl cyclohexyl (meth)acrylate, 1-ethyl cyclohexyl (meth)acrylate, 1-methyl cyclopentyl (meth)acrylate, 1-ethyl cyclopentyl (meth)acrylate, isopropyl adamantyl (meth)acrylate, and 1-ethyl cyclooctyl (meth)acrylate,
wherein the polymer has an end group having a thiocarbonylthio structure having the formula (10)
where Ar is an aromatic group or an aromatic group substituted with a halogen atom; a hydrogen group; an alkoxy group; an amino group; a nitro group; a cyano group; a group comprising carbonyl represented by —CORa in which Ra is an alkyl group or an allyl group having 1 to 8 carbon atoms or an alkoxy group or allyloxy group having 1 to 8 carbon atoms; a sulfonyl group; or a trifluoromethyl group, in an amount of from 0.001 to 30 mol % relative to all growing end groups of the polymer, and
an amount of structural units that act as organic acid is less than 2 mol % relative to all structural units in the polymer.
2. The polymer according to claim 1 , wherein the polymer is suitable for lithography applications.
3. The polymer according to claim 1 , wherein the structural unit having a group to be modified by acid comprises a structural unit derived from at least one monomer selected from the group consisting of 1-ethyl cyclohexyl methacrylate, 2-ethyl-2-adamantyl methacrylate, 1-ethyl cyclopentyl methacrylate, and isopropyl adamantyl methacrylate.
4. The polymer according to claim 1 , wherein an amount of the structural unit having a group to be modified by acid is from 20 to 60 mol % relative to all structural units in the polymer.
5. The polymer according to claim 1 , wherein the thiocarbonylthio structure of the end group of the polymer is derived from a chain transfer agent having the thiocarbonylthio structure.
6. The polymer according to claim 1 , further comprising:
a structural unit having a group with a lactone skeleton; and
a structural unit having a hydrophilic group.
7. The polymer according to claim 1 , wherein, in the formula, Ar is an aromatic group.
8. The polymer according to claim 1 , wherein
a weight-average molecular weight of the polymer measured by gel permeation chromatography with a differential refractive index detector and determined in terms of polystyrene is from 2,500 to 1,000,000, and
a peak area corresponding to a molecular weight of no greater than 1,000 in an elution curve is no greater than 1.0% of all peak areas of the polymer.
9. The polymer according to claim 8 , wherein the structural unit having a group to be modified by acid comprises a structural unit derived from at least one monomer selected from the group consisting of 1-ethyl cyclohexyl methacrylate, 2-ethyl-2-adamantyl methacrylate, 1-ethyl cyclopentyl methacrylate, and isopropyl adamantyl methacrylate.
10. The polymer according to claim 8 , further comprising:
a structural unit having a group with a lactone skeleton.
11. The polymer according to claim 8 , further comprising:
a structural unit having a hydrophilic group.
12. The polymer according to claim 8 , wherein an amount of the structural unit having a group to be modified by acid is from 20 to 60 mol % relative to all structural units in the polymer.
13. The polymer according to claim 8 , further comprising:
a structural unit having a group with a lactone skeleton; and
a structural unit having a hydrophilic group.
14. The polymer according to claim 8 , wherein, in the formula, Ar is an aromatic group.
15. The polymer according to claim 1 , further comprising:
a structural unit having a group with a lactone skeleton.
16. The polymer according to claim 15 , wherein an amount of the structural unit having a group with a lactone skeleton is from 20 to 60 mol % relative to all structural units in the polymer.
17. The polymer according to claim 15 , wherein the structural unit having a group with a lactone skeleton comprises a structural unit derived from at least one monomer selected from the group consisting of β-(meth)acryloyloxy-β-methyl-δ-valerolactone, 4,4-dimethyl-2-methylene-γ-butyrolactone β-(meth)acryloyloxy-γ-butyrolactone, β-(meth)acryloyloxy-β-methyl-γ-butyrolactone, α-(meth)acryloyloxy-γ-butyrolactone, 2-(1-(meth)acryloyloxy)ethyl-4-butanolide (meth)acrylic acid pantoyl lactone, 5-(meth)acryloyloxy-2,6-norbornane carbolactone, 8-methacryloxy-4-oxatricyclo[5.2.1.0 2,6 ]decane-3-one, and 9-methacryloxy-4-oxatricyclo[5.2.1.0 2,6 ]decane-3-one.
18. The polymer according to claim 1 , further comprising:
a structural unit having a hydrophilic group.
19. The polymer according to claim 18 , wherein an amount of the structural unit having a hydrophilic group is from 5 to 50 mol % relative to all structural units in the polymer.
20. The polymer according to claim 18 , wherein the structural unit having a hydrophilic group comprises a structural unit derived from at least one monomer selected from the group consisting of (meth)acrylic acid, 2-hydroxyethyl (meth)acrylate, 3-hydroxypropyl (meth)acrylate, 2-hydroxy-n-propyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate, 3-hydroxyadmantyl (meth)acrylate, 2- or 3-cyano-5-norbornene (meth)acrylate, and 2-cyanomethyl-2-adamantyl (meth)acrylate.